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- W2951509358 abstract "Exposure of Si surfaces to reactive ion etching (RIE) mode CHF3 plasmas leads to the deposition of a C and F containing polymeric film." @default.
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- W2951509358 date "1988-10-04" @default.
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- W2951509358 title "ChemInform Abstract: Contamination of Silicon Surfaces Exposed to CHF3 Plasmas. An XPS Study of the Film and the Film-Surface Interface." @default.
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- W2951509358 doi "https://doi.org/10.1002/chin.198840010" @default.
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