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• W2951736019 abstract "In this paper present, an electrostatic actuation mechanism based on the interdigitated electrode for the Biomedical Micro Electro Mechanical Systems (Bio-MEMS) sensors was mainly used for sensing or actuation in analytical and different detection applications. One of the main things interdigitated electrode (IDE) for capacitance derived from multiple electrode pairs has been connected in parallel with wide proof mass, folded spring beam attached as anchor in the sensor construction. The total capacitance was a sum of capacitance contributed by neighbouring electrodes. Hence the opposite walls of comb electrodes in the overlapping region form a parallel plate capacitor and contribute a capacitance C easily analyzed with fringe capacitance can be estimated to analytically difficult one. However, the nearly accurate way to estimate for the fringe capacitance is by using the finite element method (FEM). The major importance of the geometric dimensions on interdigitated electrode sensors are studied with an analytical model. The design of capacitive based IDE sensors are simulated and demonstrated on visualizing of the electrical properties by COMSOL Multiphysics software." @default.
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• W2951736019 date "2019-10-01" @default.
• W2951736019 modified "2023-09-27" @default.
• W2951736019 title "Design of capacitance based on interdigitated electrode for BioMEMS sensor application" @default.
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• W2951736019 doi "https://doi.org/10.1016/j.mssp.2019.06.005" @default.
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