Matches in SemOpenAlex for { <https://semopenalex.org/work/W2952016206> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2952016206 endingPage "no" @default.
- W2952016206 startingPage "no" @default.
- W2952016206 abstract "Si-C films were prepared on steel by the microwave (2.45 GHz) decomposition of tetramethylsilane (TMS) diluted in argon. The device used decouples the plasma power and the substrate temperature. The effects of various parameters (substrate position, temperature, gas flow rate, power, pressure) on composition and deposition rate were investigated. They are discussed in relation to electrostatic probe measurements. For all conditions, deposition rates are high (3–60 μm h−1). By using only TMS, the Si/C ratio in the films is restricted to values between 0.3 and 0.7. The variations in the process parameters do not induce significant changes in film compositions, however, they significantly change the deposition rates and the film hardness. In this field, the TMS dissociation process seems quite invariant with the conditions. With the introduction of SiH4 to the input gas phase (i.e., mixture SiH4 + TMS + Ar), silicon-rich films were obtained. The composition range was extended to Si/C = 1.7 but the mechanical properties are strongly changed." @default.
- W2952016206 created "2019-06-27" @default.
- W2952016206 creator A5045213714 @default.
- W2952016206 creator A5047537973 @default.
- W2952016206 creator A5071359422 @default.
- W2952016206 creator A5086552836 @default.
- W2952016206 date "2010-08-03" @default.
- W2952016206 modified "2023-09-26" @default.
- W2952016206 title "ChemInform Abstract: Microwave Plasma CVD in the System Si-C-H-Ar: Effect of Process Parameters." @default.
- W2952016206 cites W1981023005 @default.
- W2952016206 doi "https://doi.org/10.1002/chin.199731038" @default.
- W2952016206 hasPublicationYear "2010" @default.
- W2952016206 type Work @default.
- W2952016206 sameAs 2952016206 @default.
- W2952016206 citedByCount "0" @default.
- W2952016206 crossrefType "journal-article" @default.
- W2952016206 hasAuthorship W2952016206A5045213714 @default.
- W2952016206 hasAuthorship W2952016206A5047537973 @default.
- W2952016206 hasAuthorship W2952016206A5071359422 @default.
- W2952016206 hasAuthorship W2952016206A5086552836 @default.
- W2952016206 hasConcept C102931765 @default.
- W2952016206 hasConcept C111368507 @default.
- W2952016206 hasConcept C113196181 @default.
- W2952016206 hasConcept C121332964 @default.
- W2952016206 hasConcept C127313418 @default.
- W2952016206 hasConcept C147789679 @default.
- W2952016206 hasConcept C151730666 @default.
- W2952016206 hasConcept C172120300 @default.
- W2952016206 hasConcept C178790620 @default.
- W2952016206 hasConcept C185592680 @default.
- W2952016206 hasConcept C2777289219 @default.
- W2952016206 hasConcept C2778200147 @default.
- W2952016206 hasConcept C2816523 @default.
- W2952016206 hasConcept C44838205 @default.
- W2952016206 hasConcept C544956773 @default.
- W2952016206 hasConcept C547737533 @default.
- W2952016206 hasConcept C62520636 @default.
- W2952016206 hasConcept C64297162 @default.
- W2952016206 hasConcept C82706917 @default.
- W2952016206 hasConcept C86803240 @default.
- W2952016206 hasConcept C97355855 @default.
- W2952016206 hasConceptScore W2952016206C102931765 @default.
- W2952016206 hasConceptScore W2952016206C111368507 @default.
- W2952016206 hasConceptScore W2952016206C113196181 @default.
- W2952016206 hasConceptScore W2952016206C121332964 @default.
- W2952016206 hasConceptScore W2952016206C127313418 @default.
- W2952016206 hasConceptScore W2952016206C147789679 @default.
- W2952016206 hasConceptScore W2952016206C151730666 @default.
- W2952016206 hasConceptScore W2952016206C172120300 @default.
- W2952016206 hasConceptScore W2952016206C178790620 @default.
- W2952016206 hasConceptScore W2952016206C185592680 @default.
- W2952016206 hasConceptScore W2952016206C2777289219 @default.
- W2952016206 hasConceptScore W2952016206C2778200147 @default.
- W2952016206 hasConceptScore W2952016206C2816523 @default.
- W2952016206 hasConceptScore W2952016206C44838205 @default.
- W2952016206 hasConceptScore W2952016206C544956773 @default.
- W2952016206 hasConceptScore W2952016206C547737533 @default.
- W2952016206 hasConceptScore W2952016206C62520636 @default.
- W2952016206 hasConceptScore W2952016206C64297162 @default.
- W2952016206 hasConceptScore W2952016206C82706917 @default.
- W2952016206 hasConceptScore W2952016206C86803240 @default.
- W2952016206 hasConceptScore W2952016206C97355855 @default.
- W2952016206 hasIssue "31" @default.
- W2952016206 hasLocation W29520162061 @default.
- W2952016206 hasOpenAccess W2952016206 @default.
- W2952016206 hasPrimaryLocation W29520162061 @default.
- W2952016206 hasRelatedWork W2007147292 @default.
- W2952016206 hasRelatedWork W2010517217 @default.
- W2952016206 hasRelatedWork W2029632895 @default.
- W2952016206 hasRelatedWork W2040462345 @default.
- W2952016206 hasRelatedWork W2052836271 @default.
- W2952016206 hasRelatedWork W2060326841 @default.
- W2952016206 hasRelatedWork W2071673944 @default.
- W2952016206 hasRelatedWork W2080428418 @default.
- W2952016206 hasRelatedWork W2085921166 @default.
- W2952016206 hasRelatedWork W2101286387 @default.
- W2952016206 hasRelatedWork W2313227099 @default.
- W2952016206 hasRelatedWork W2318364456 @default.
- W2952016206 hasRelatedWork W2327825484 @default.
- W2952016206 hasRelatedWork W2342984182 @default.
- W2952016206 hasRelatedWork W2364698652 @default.
- W2952016206 hasRelatedWork W2372682103 @default.
- W2952016206 hasRelatedWork W2387433254 @default.
- W2952016206 hasRelatedWork W2502630078 @default.
- W2952016206 hasRelatedWork W2465744433 @default.
- W2952016206 hasRelatedWork W2468887998 @default.
- W2952016206 hasVolume "28" @default.
- W2952016206 isParatext "false" @default.
- W2952016206 isRetracted "false" @default.
- W2952016206 magId "2952016206" @default.
- W2952016206 workType "article" @default.