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- W2952049501 abstract "A process of conversion of oxide/nitride into a single layer oxide using plasma oxidation at moderate temperature (≤800°C) is discussed. Physical parameters, refractive index, etch rate, etc. of this plasma‐converted oxide are found to be similar to that of thermal . In addition, dielectric strength and charge level in such insulator are also comparable to thermally grown. Metal oxide semiconductor (MOS) structures as well as MOSFET device characteristics indicate its excellent feasibility as a gate dielectric in MOS technology." @default.
- W2952049501 created "2019-06-27" @default.
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- W2952049501 date "1979-03-27" @default.
- W2952049501 modified "2023-09-23" @default.
- W2952049501 title "ChemInform Abstract: CHARACTERISTICS OF PLASMA-OXIDIZED NITRIDE MOS STRUCTURES" @default.
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- W2952049501 doi "https://doi.org/10.1002/chin.197913017" @default.
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