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- W2952279153 abstract "Methods for selectively forming titanium silicide and titanium boride by vapor phase reaction of titanium chloride precursors with silicon or boron substrate surfaces are examined. By passing TiCl 4 through a heated chamber packed with titanium metal turnings within the reactor tube, a reduced titanium halide is generated. It was found that the silicide or boride formation in the reactor can thus be controlled at a much lower temperature. Characterization of the resulting films was conducted by use of scanning and transmission electron microscopy, sheet resistance measurements, and x-ray diffraction" @default.
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- W2952279153 date "1990-07-31" @default.
- W2952279153 modified "2023-09-27" @default.
- W2952279153 title "ChemInform Abstract: Selective Silicide or Boride Film Formation by Reaction of Vapor Phase TiCl4 with Silicon or Boron." @default.
- W2952279153 cites W1978800717 @default.
- W2952279153 doi "https://doi.org/10.1002/chin.199031333" @default.
- W2952279153 hasPublicationYear "1990" @default.
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