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• W2952316674 endingPage "8" @default.
• W2952316674 startingPage "5" @default.
• W2952316674 abstract "Growth of epitaxial AIN from a directly bonded compound in the absence of any NH3, as described here, is an important technological advance. It is reported that the use of the adduct Me3AINH3 as a single-source precursor has allowed the epitaxial growth on sapphire of AIN films of a quality suitable for buffer layers in the growth of device layers avoiding the disadvantages of traditional MOCVD of AIN. Details are given of deposition schemes, the carbon and oxygen contamination is discussed, and a probable deposition mechanism is proposed." @default.
• W2952316674 created "2019-06-27" @default.
• W2952316674 creator A5000285647 @default.
• W2952316674 creator A5014848032 @default.
• W2952316674 creator A5020916055 @default.
• W2952316674 creator A5052541571 @default.
• W2952316674 creator A5075428131 @default.
• W2952316674 creator A5086524561 @default.
• W2952316674 creator A5087100369 @default.
• W2952316674 date "1996-01-01" @default.
• W2952316674 modified "2023-10-17" @default.
• W2952316674 title "Deposition of aluminum nitride thin films by MOCVD from the trimethylaluminum-ammonia adduct" @default.
• W2952316674 cites W1969241481 @default.
• W2952316674 cites W1970066516 @default.
• W2952316674 cites W1975326701 @default.
• W2952316674 cites W1985632825 @default.
• W2952316674 cites W1988730919 @default.
• W2952316674 cites W1992943865 @default.
• W2952316674 cites W2001172138 @default.
• W2952316674 cites W2002760569 @default.
• W2952316674 cites W2010277141 @default.
• W2952316674 cites W2011919858 @default.
• W2952316674 cites W2013103103 @default.
• W2952316674 cites W2019854687 @default.
• W2952316674 cites W2026445073 @default.
• W2952316674 cites W2035369606 @default.
• W2952316674 cites W2037561827 @default.
• W2952316674 cites W2042076370 @default.
• W2952316674 cites W2057216300 @default.
• W2952316674 cites W2059310165 @default.
• W2952316674 cites W2071623692 @default.
• W2952316674 cites W2093655278 @default.
• W2952316674 doi "https://doi.org/10.1002/cvde.19960020102" @default.
• W2952316674 hasPublicationYear "1996" @default.
• W2952316674 type Work @default.
• W2952316674 sameAs 2952316674 @default.
• W2952316674 citedByCount "27" @default.
• W2952316674 countsByYear W29523166742012 @default.
• W2952316674 countsByYear W29523166742013 @default.
• W2952316674 countsByYear W29523166742014 @default.
• W2952316674 countsByYear W29523166742017 @default.
• W2952316674 countsByYear W29523166742018 @default.
• W2952316674 countsByYear W29523166742019 @default.
• W2952316674 countsByYear W29523166742022 @default.
• W2952316674 countsByYear W29523166742023 @default.
• W2952316674 crossrefType "journal-article" @default.
• W2952316674 hasAuthorship W2952316674A5000285647 @default.
• W2952316674 hasAuthorship W2952316674A5014848032 @default.
• W2952316674 hasAuthorship W2952316674A5020916055 @default.
• W2952316674 hasAuthorship W2952316674A5052541571 @default.
• W2952316674 hasAuthorship W2952316674A5075428131 @default.
• W2952316674 hasAuthorship W2952316674A5086524561 @default.
• W2952316674 hasAuthorship W2952316674A5087100369 @default.
• W2952316674 hasConcept C104779481 @default.
• W2952316674 hasConcept C108204754 @default.
• W2952316674 hasConcept C110738630 @default.
• W2952316674 hasConcept C120665830 @default.
• W2952316674 hasConcept C121332964 @default.
• W2952316674 hasConcept C127413603 @default.
• W2952316674 hasConcept C140205800 @default.
• W2952316674 hasConcept C151730666 @default.
• W2952316674 hasConcept C159985019 @default.
• W2952316674 hasConcept C171250308 @default.
• W2952316674 hasConcept C175665537 @default.
• W2952316674 hasConcept C178790620 @default.
• W2952316674 hasConcept C179104552 @default.
• W2952316674 hasConcept C185592680 @default.
• W2952316674 hasConcept C19067145 @default.
• W2952316674 hasConcept C192562407 @default.
• W2952316674 hasConcept C194760766 @default.
• W2952316674 hasConcept C2776382133 @default.
• W2952316674 hasConcept C2779227376 @default.
• W2952316674 hasConcept C2780064504 @default.
• W2952316674 hasConcept C2816523 @default.
• W2952316674 hasConcept C42360764 @default.
• W2952316674 hasConcept C513153333 @default.
• W2952316674 hasConcept C520434653 @default.
• W2952316674 hasConcept C57410435 @default.
• W2952316674 hasConcept C64297162 @default.
• W2952316674 hasConcept C86803240 @default.
• W2952316674 hasConceptScore W2952316674C104779481 @default.
• W2952316674 hasConceptScore W2952316674C108204754 @default.
• W2952316674 hasConceptScore W2952316674C110738630 @default.
• W2952316674 hasConceptScore W2952316674C120665830 @default.
• W2952316674 hasConceptScore W2952316674C121332964 @default.
• W2952316674 hasConceptScore W2952316674C127413603 @default.
• W2952316674 hasConceptScore W2952316674C140205800 @default.
• W2952316674 hasConceptScore W2952316674C151730666 @default.
• W2952316674 hasConceptScore W2952316674C159985019 @default.
• W2952316674 hasConceptScore W2952316674C171250308 @default.
• W2952316674 hasConceptScore W2952316674C175665537 @default.
• W2952316674 hasConceptScore W2952316674C178790620 @default.
• W2952316674 hasConceptScore W2952316674C179104552 @default.
• W2952316674 hasConceptScore W2952316674C185592680 @default.
• W2952316674 hasConceptScore W2952316674C19067145 @default.
• W2952316674 hasConceptScore W2952316674C192562407 @default.
• W2952316674 hasConceptScore W2952316674C194760766 @default.
• W2952316674 hasConceptScore W2952316674C2776382133 @default.

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