Matches in SemOpenAlex for { <https://semopenalex.org/work/W2952648552> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2952648552 abstract "A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra-sensitive mass detection. Energy dissipation from intrinsic mechanical loss of the PZT film was successfully compressed by separating the PZT actuator from resonant structure. Excellent Q-factor, which is several times larger than conventional PZT cantilever, was achieved under both atmospheric pressure and reduced pressures. For a 30 micrometer-wide 100 micrometer-long cantilever, Q-factor was measured as high as 1113 and 7279 under the pressure of 101.2 KPa and 35 Pa, respectively. Moreover, it was found that high-mode vibration can be realized by the cantilever for the pursuit of great Q-factor, while support loss became significant because of the increased vibration amplitude at the actuation point. An optimized structure using node-point actuation was suggested then to suppress corresponding energy dissipation." @default.
- W2952648552 created "2019-06-27" @default.
- W2952648552 creator A5011917411 @default.
- W2952648552 creator A5033535293 @default.
- W2952648552 creator A5044544424 @default.
- W2952648552 creator A5075597239 @default.
- W2952648552 creator A5077335806 @default.
- W2952648552 creator A5089712273 @default.
- W2952648552 date "2008-05-07" @default.
- W2952648552 modified "2023-09-27" @default.
- W2952648552 title "High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection" @default.
- W2952648552 cites W1963915642 @default.
- W2952648552 cites W1969003630 @default.
- W2952648552 cites W2042548359 @default.
- W2952648552 cites W2075583507 @default.
- W2952648552 cites W2123580065 @default.
- W2952648552 cites W2162533706 @default.
- W2952648552 hasPublicationYear "2008" @default.
- W2952648552 type Work @default.
- W2952648552 sameAs 2952648552 @default.
- W2952648552 citedByCount "0" @default.
- W2952648552 crossrefType "posted-content" @default.
- W2952648552 hasAuthorship W2952648552A5011917411 @default.
- W2952648552 hasAuthorship W2952648552A5033535293 @default.
- W2952648552 hasAuthorship W2952648552A5044544424 @default.
- W2952648552 hasAuthorship W2952648552A5075597239 @default.
- W2952648552 hasAuthorship W2952648552A5077335806 @default.
- W2952648552 hasAuthorship W2952648552A5089712273 @default.
- W2952648552 hasConcept C100082104 @default.
- W2952648552 hasConcept C119599485 @default.
- W2952648552 hasConcept C120665830 @default.
- W2952648552 hasConcept C121332964 @default.
- W2952648552 hasConcept C127413603 @default.
- W2952648552 hasConcept C135402231 @default.
- W2952648552 hasConcept C141354745 @default.
- W2952648552 hasConcept C159985019 @default.
- W2952648552 hasConcept C171635847 @default.
- W2952648552 hasConcept C172707124 @default.
- W2952648552 hasConcept C187725362 @default.
- W2952648552 hasConcept C192562407 @default.
- W2952648552 hasConcept C198394728 @default.
- W2952648552 hasConcept C24890656 @default.
- W2952648552 hasConcept C49040817 @default.
- W2952648552 hasConcept C544956773 @default.
- W2952648552 hasConcept C97126364 @default.
- W2952648552 hasConcept C97355855 @default.
- W2952648552 hasConceptScore W2952648552C100082104 @default.
- W2952648552 hasConceptScore W2952648552C119599485 @default.
- W2952648552 hasConceptScore W2952648552C120665830 @default.
- W2952648552 hasConceptScore W2952648552C121332964 @default.
- W2952648552 hasConceptScore W2952648552C127413603 @default.
- W2952648552 hasConceptScore W2952648552C135402231 @default.
- W2952648552 hasConceptScore W2952648552C141354745 @default.
- W2952648552 hasConceptScore W2952648552C159985019 @default.
- W2952648552 hasConceptScore W2952648552C171635847 @default.
- W2952648552 hasConceptScore W2952648552C172707124 @default.
- W2952648552 hasConceptScore W2952648552C187725362 @default.
- W2952648552 hasConceptScore W2952648552C192562407 @default.
- W2952648552 hasConceptScore W2952648552C198394728 @default.
- W2952648552 hasConceptScore W2952648552C24890656 @default.
- W2952648552 hasConceptScore W2952648552C49040817 @default.
- W2952648552 hasConceptScore W2952648552C544956773 @default.
- W2952648552 hasConceptScore W2952648552C97126364 @default.
- W2952648552 hasConceptScore W2952648552C97355855 @default.
- W2952648552 hasLocation W29526485521 @default.
- W2952648552 hasOpenAccess W2952648552 @default.
- W2952648552 hasPrimaryLocation W29526485521 @default.
- W2952648552 hasRelatedWork W1977403203 @default.
- W2952648552 hasRelatedWork W1991484805 @default.
- W2952648552 hasRelatedWork W1992369658 @default.
- W2952648552 hasRelatedWork W2003404704 @default.
- W2952648552 hasRelatedWork W2019956357 @default.
- W2952648552 hasRelatedWork W2021896543 @default.
- W2952648552 hasRelatedWork W2031936218 @default.
- W2952648552 hasRelatedWork W2052282168 @default.
- W2952648552 hasRelatedWork W2058722109 @default.
- W2952648552 hasRelatedWork W2062028324 @default.
- W2952648552 hasRelatedWork W2069085886 @default.
- W2952648552 hasRelatedWork W2075269610 @default.
- W2952648552 hasRelatedWork W2133069847 @default.
- W2952648552 hasRelatedWork W2146314153 @default.
- W2952648552 hasRelatedWork W2147927045 @default.
- W2952648552 hasRelatedWork W2398486072 @default.
- W2952648552 hasRelatedWork W2545368710 @default.
- W2952648552 hasRelatedWork W2781647166 @default.
- W2952648552 hasRelatedWork W2789383184 @default.
- W2952648552 hasRelatedWork W2890907517 @default.
- W2952648552 isParatext "false" @default.
- W2952648552 isRetracted "false" @default.
- W2952648552 magId "2952648552" @default.
- W2952648552 workType "article" @default.