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- W2952809433 abstract "Structural analyses revealed Ti film thickness at the bonded interface as more than twice that of the original thickness, with enhanced Ti oxide formation with oxygen dissociated from oxide underlayers. This process provides an interface with 100% light transmittance." @default.
- W2952809433 created "2019-06-27" @default.
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- W2952809433 date "2019-05-01" @default.
- W2952809433 modified "2023-09-26" @default.
- W2952809433 title "Oxidation of Bonded Thin Ti Films Using Oxide Underlayers in Atomic Diffusion Bonding Process for Optical Applications" @default.
- W2952809433 doi "https://doi.org/10.23919/ltb-3d.2019.8735120" @default.
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