FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2952895776> ?p ?o ?g. }

• W2952895776 endingPage "320" @default.
• W2952895776 startingPage "320" @default.
• W2952895776 abstract "A 2.45 GHz microwave-plasma chemical-vapor deposition (MPCVD) reactor was designed and built in-house by collaborating with Guangdong TrueOne Semiconductor Technology Co., Ltd. A cylindrical cavity was designed as the deposition chamber and a circumferential coaxial-mode transformer located at the top of the cavity was adopted as the antenna. Two quartz-ring windows that were placed far away from the plasma and cooled by water-cooling cavity walls were used to affix the antenna to the cavity and act as a vacuum seal for the reactor, respectively. This design improved the sealing and protected the quartz windows. In addition, a numerical simulation was proposed to predict the electric-field and plasma-density distributions in the cavity. Based on the simulation results, a microwave-plasma reactor with TM021 mode was built. The leak rate of this new reactor was tested to be as low as 1 × 10−8 Pa·m3·s−1, and the maximal microwave power was as high as 10 kW. Then, single-crystal diamond films were grown with the morphology and crystalline quality characterized by an optical microscope, atomic force microscope (AFM), Raman spectrometer, photoluminescence (PL) spectrometer, and high-resolution X-ray diffractometer. It was shown that the newly developed MPCVD reactor can produce diamond films with high quality and purity." @default.
• W2952895776 created "2019-06-27" @default.
• W2952895776 creator A5005006218 @default.
• W2952895776 creator A5015247269 @default.
• W2952895776 creator A5037483855 @default.
• W2952895776 creator A5062171476 @default.
• W2952895776 creator A5064115783 @default.
• W2952895776 creator A5069604670 @default.
• W2952895776 date "2019-06-24" @default.
• W2952895776 modified "2023-09-26" @default.
• W2952895776 title "Simulation-Based Development of a New Cylindrical-Cavity Microwave-Plasma Reactor for Diamond-Film Synthesis" @default.
• W2952895776 cites W1964879436 @default.
• W2952895776 cites W1971186438 @default.
• W2952895776 cites W1995608178 @default.
• W2952895776 cites W1998829222 @default.
• W2952895776 cites W2001236033 @default.
• W2952895776 cites W2002684020 @default.
• W2952895776 cites W2009280124 @default.
• W2952895776 cites W2015204361 @default.
• W2952895776 cites W2024707364 @default.
• W2952895776 cites W2031778791 @default.
• W2952895776 cites W2032632753 @default.
• W2952895776 cites W2061187571 @default.
• W2952895776 cites W2068646130 @default.
• W2952895776 cites W2081580844 @default.
• W2952895776 cites W2082348030 @default.
• W2952895776 cites W2084529687 @default.
• W2952895776 cites W2085729447 @default.
• W2952895776 cites W2090001837 @default.
• W2952895776 cites W2127382834 @default.
• W2952895776 cites W2267033657 @default.
• W2952895776 cites W2301688157 @default.
• W2952895776 cites W2311985407 @default.
• W2952895776 cites W2344535632 @default.
• W2952895776 cites W2560773289 @default.
• W2952895776 cites W2583510565 @default.
• W2952895776 cites W2623203780 @default.
• W2952895776 cites W2749731179 @default.
• W2952895776 cites W2894509061 @default.
• W2952895776 cites W3100806243 @default.
• W2952895776 cites W4232597892 @default.
• W2952895776 doi "https://doi.org/10.3390/cryst9060320" @default.
• W2952895776 hasPublicationYear "2019" @default.
• W2952895776 type Work @default.
• W2952895776 sameAs 2952895776 @default.
• W2952895776 citedByCount "13" @default.
• W2952895776 countsByYear W29528957762019 @default.
• W2952895776 countsByYear W29528957762020 @default.
• W2952895776 countsByYear W29528957762021 @default.
• W2952895776 countsByYear W29528957762022 @default.
• W2952895776 countsByYear W29528957762023 @default.
• W2952895776 crossrefType "journal-article" @default.
• W2952895776 hasAuthorship W2952895776A5005006218 @default.
• W2952895776 hasAuthorship W2952895776A5015247269 @default.
• W2952895776 hasAuthorship W2952895776A5037483855 @default.
• W2952895776 hasAuthorship W2952895776A5062171476 @default.
• W2952895776 hasAuthorship W2952895776A5064115783 @default.
• W2952895776 hasAuthorship W2952895776A5069604670 @default.
• W2952895776 hasBestOaLocation W29528957761 @default.
• W2952895776 hasConcept C113196181 @default.
• W2952895776 hasConcept C119599485 @default.
• W2952895776 hasConcept C120665830 @default.
• W2952895776 hasConcept C121332964 @default.
• W2952895776 hasConcept C127413603 @default.
• W2952895776 hasConcept C159985019 @default.
• W2952895776 hasConcept C185592680 @default.
• W2952895776 hasConcept C192562407 @default.
• W2952895776 hasConcept C26771246 @default.
• W2952895776 hasConcept C2776921476 @default.
• W2952895776 hasConcept C39546656 @default.
• W2952895776 hasConcept C40003534 @default.
• W2952895776 hasConcept C43617362 @default.
• W2952895776 hasConcept C44838205 @default.
• W2952895776 hasConcept C49040817 @default.
• W2952895776 hasConcept C51221625 @default.
• W2952895776 hasConcept C57410435 @default.
• W2952895776 hasConcept C62520636 @default.
• W2952895776 hasConcept C82706917 @default.
• W2952895776 hasConceptScore W2952895776C113196181 @default.
• W2952895776 hasConceptScore W2952895776C119599485 @default.
• W2952895776 hasConceptScore W2952895776C120665830 @default.
• W2952895776 hasConceptScore W2952895776C121332964 @default.
• W2952895776 hasConceptScore W2952895776C127413603 @default.
• W2952895776 hasConceptScore W2952895776C159985019 @default.
• W2952895776 hasConceptScore W2952895776C185592680 @default.
• W2952895776 hasConceptScore W2952895776C192562407 @default.
• W2952895776 hasConceptScore W2952895776C26771246 @default.
• W2952895776 hasConceptScore W2952895776C2776921476 @default.
• W2952895776 hasConceptScore W2952895776C39546656 @default.
• W2952895776 hasConceptScore W2952895776C40003534 @default.
• W2952895776 hasConceptScore W2952895776C43617362 @default.
• W2952895776 hasConceptScore W2952895776C44838205 @default.
• W2952895776 hasConceptScore W2952895776C49040817 @default.
• W2952895776 hasConceptScore W2952895776C51221625 @default.
• W2952895776 hasConceptScore W2952895776C57410435 @default.
• W2952895776 hasConceptScore W2952895776C62520636 @default.
• W2952895776 hasConceptScore W2952895776C82706917 @default.
• W2952895776 hasFunder F4320335595 @default.

• next