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• W2952908944 abstract "The use of silicon wafer substrates with a diameter of 300 mm for the manufacturing of electronic devices strongly increases the overall productivity of a device manufacturing line. However, float‐zone (FZ) silicon, which is traditionally used for insulated gate bipolar transistors (IGBTs), is not available for wafer diameters exceeding 200 mm. Therefore, a silicon material fabricated by the magnetic Czochralski (m:Cz) method has to be used for IGBT production on 300 mm wafers. Critical issues of this material are the so‐called crystal originated particles (COPs) and the strong axial variation of the doping level along the crystal. Furthermore, the m:Cz material contains a relatively high concentration of oxygen so that the influence of carbon/oxygen complexes has to be considered. C I O I complexes can be decorated with hydrogen atoms, resulting in donor‐like complexes. In particular, the application of proton irradiation for the doping of the field‐stop zone results in a relatively high concentration of interstitial carbon, which is continuatively associated with the generation of undesired donors. It is shown that the electrical behavior of IGBTs fabricated on FZ substrates can be well reproduced using the m:Cz material if the parameters of the hydrogen implantation are adjusted appropriately." @default.
• W2952908944 created "2019-06-27" @default.
• W2952908944 creator A5000257043 @default.
• W2952908944 creator A5010305810 @default.
• W2952908944 creator A5065543019 @default.
• W2952908944 creator A5073645865 @default.
• W2952908944 creator A5078539487 @default.
• W2952908944 date "2019-07-15" @default.
• W2952908944 modified "2023-10-02" @default.
• W2952908944 title "Fabrication of Medium Power Insulated Gate Bipolar Transistors Using 300 mm Magnetic Czochralski Silicon Wafers" @default.
• W2952908944 cites W1999380105 @default.
• W2952908944 cites W2002638650 @default.
• W2952908944 cites W2006594064 @default.
• W2952908944 cites W2018011306 @default.
• W2952908944 cites W2018682367 @default.
• W2952908944 cites W2032889012 @default.
• W2952908944 cites W2034732372 @default.
• W2952908944 cites W2040706136 @default.
• W2952908944 cites W2059530451 @default.
• W2952908944 cites W2086099397 @default.
• W2952908944 cites W2091739812 @default.
• W2952908944 cites W2094737589 @default.
• W2952908944 cites W2112014749 @default.
• W2952908944 cites W2149001133 @default.
• W2952908944 cites W2149938382 @default.
• W2952908944 cites W2162578266 @default.
• W2952908944 cites W2496251771 @default.
• W2952908944 doi "https://doi.org/10.1002/pssa.201900235" @default.
• W2952908944 hasPublicationYear "2019" @default.
• W2952908944 type Work @default.
• W2952908944 sameAs 2952908944 @default.
• W2952908944 citedByCount "7" @default.
• W2952908944 countsByYear W29529089442019 @default.
• W2952908944 countsByYear W29529089442020 @default.
• W2952908944 countsByYear W29529089442021 @default.
• W2952908944 countsByYear W29529089442022 @default.
• W2952908944 crossrefType "journal-article" @default.
• W2952908944 hasAuthorship W2952908944A5000257043 @default.
• W2952908944 hasAuthorship W2952908944A5010305810 @default.
• W2952908944 hasAuthorship W2952908944A5065543019 @default.
• W2952908944 hasAuthorship W2952908944A5073645865 @default.
• W2952908944 hasAuthorship W2952908944A5078539487 @default.
• W2952908944 hasConcept C104779481 @default.
• W2952908944 hasConcept C119599485 @default.
• W2952908944 hasConcept C127413603 @default.
• W2952908944 hasConcept C136525101 @default.
• W2952908944 hasConcept C140205800 @default.
• W2952908944 hasConcept C142724271 @default.
• W2952908944 hasConcept C159985019 @default.
• W2952908944 hasConcept C160671074 @default.
• W2952908944 hasConcept C165801399 @default.
• W2952908944 hasConcept C172385210 @default.
• W2952908944 hasConcept C192562407 @default.
• W2952908944 hasConcept C199360897 @default.
• W2952908944 hasConcept C204787440 @default.
• W2952908944 hasConcept C23061349 @default.
• W2952908944 hasConcept C2781285689 @default.
• W2952908944 hasConcept C28285623 @default.
• W2952908944 hasConcept C41008148 @default.
• W2952908944 hasConcept C49040817 @default.
• W2952908944 hasConcept C544956773 @default.
• W2952908944 hasConcept C57863236 @default.
• W2952908944 hasConcept C71924100 @default.
• W2952908944 hasConceptScore W2952908944C104779481 @default.
• W2952908944 hasConceptScore W2952908944C119599485 @default.
• W2952908944 hasConceptScore W2952908944C127413603 @default.
• W2952908944 hasConceptScore W2952908944C136525101 @default.
• W2952908944 hasConceptScore W2952908944C140205800 @default.
• W2952908944 hasConceptScore W2952908944C142724271 @default.
• W2952908944 hasConceptScore W2952908944C159985019 @default.
• W2952908944 hasConceptScore W2952908944C160671074 @default.
• W2952908944 hasConceptScore W2952908944C165801399 @default.
• W2952908944 hasConceptScore W2952908944C172385210 @default.
• W2952908944 hasConceptScore W2952908944C192562407 @default.
• W2952908944 hasConceptScore W2952908944C199360897 @default.
• W2952908944 hasConceptScore W2952908944C204787440 @default.
• W2952908944 hasConceptScore W2952908944C23061349 @default.
• W2952908944 hasConceptScore W2952908944C2781285689 @default.
• W2952908944 hasConceptScore W2952908944C28285623 @default.
• W2952908944 hasConceptScore W2952908944C41008148 @default.
• W2952908944 hasConceptScore W2952908944C49040817 @default.
• W2952908944 hasConceptScore W2952908944C544956773 @default.
• W2952908944 hasConceptScore W2952908944C57863236 @default.
• W2952908944 hasConceptScore W2952908944C71924100 @default.
• W2952908944 hasIssue "17" @default.
• W2952908944 hasLocation W29529089441 @default.
• W2952908944 hasOpenAccess W2952908944 @default.
• W2952908944 hasPrimaryLocation W29529089441 @default.
• W2952908944 hasRelatedWork W1731227722 @default.
• W2952908944 hasRelatedWork W1983621312 @default.
• W2952908944 hasRelatedWork W1992892446 @default.
• W2952908944 hasRelatedWork W2042779311 @default.
• W2952908944 hasRelatedWork W2046703922 @default.
• W2952908944 hasRelatedWork W2063388817 @default.
• W2952908944 hasRelatedWork W2065467474 @default.
• W2952908944 hasRelatedWork W2199927463 @default.
• W2952908944 hasRelatedWork W2471033405 @default.
• W2952908944 hasRelatedWork W4381745617 @default.
• W2952908944 hasVolume "216" @default.
• W2952908944 isParatext "false" @default.

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