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- W2952975369 abstract "Erhitzen von oxidierten Si-Plättchen (bei 1000°C in feuchtem O2-Gas) in wasserfreiem NH3 -Gas bewirkt direkte Umwandlung des SiOz in Si3N4 oder in Si-oxidnitrid." @default.
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- W2952975369 date "1981-01-13" @default.
- W2952975369 modified "2023-09-26" @default.
- W2952975369 title "ChemInform Abstract: DIRECT THERMAL NITRIDATION OF SILICON DIOXIDE FILMS IN ANHYDROUS AMMONIA GAS" @default.
- W2952975369 cites W2148341276 @default.
- W2952975369 doi "https://doi.org/10.1002/chin.198102032" @default.
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