Matches in SemOpenAlex for { <https://semopenalex.org/work/W2953033242> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2953033242 abstract "In RF-MEMS packaging, next to the protection of movable structures, optimization of package electrical performance plays a very important role. In this work, a wafer-level packaging process has been investigated and optimized in order to minimize electrical parasitic effects. The RF-MEMS package concept used is based on a wafer-level bonding of a capping silicon substrate to an RF-MEMS wafer. The capping silicon substrate resistivity, substrate thickness and the geometry of through-substrate electrical interconnect vias have been optimized using finite-element electromagnetic simulations (Ansoft HFSS). Test structures for electrical characterization have been designed and after their fabrication, measurement results will be compared with simulations." @default.
- W2953033242 created "2019-06-27" @default.
- W2953033242 creator A5006620333 @default.
- W2953033242 creator A5048445129 @default.
- W2953033242 creator A5056017831 @default.
- W2953033242 creator A5056221557 @default.
- W2953033242 creator A5057494815 @default.
- W2953033242 creator A5077910870 @default.
- W2953033242 date "2006-04-01" @default.
- W2953033242 modified "2023-10-05" @default.
- W2953033242 title "PARASITIC EFFECTS REDUCTION FOR WAFER-LEVEL PACKAGING OF RF-MEMS" @default.
- W2953033242 cites W1963772310 @default.
- W2953033242 cites W2153205704 @default.
- W2953033242 cites W2153439099 @default.
- W2953033242 hasPublicationYear "2006" @default.
- W2953033242 type Work @default.
- W2953033242 sameAs 2953033242 @default.
- W2953033242 citedByCount "0" @default.
- W2953033242 crossrefType "proceedings-article" @default.
- W2953033242 hasAuthorship W2953033242A5006620333 @default.
- W2953033242 hasAuthorship W2953033242A5048445129 @default.
- W2953033242 hasAuthorship W2953033242A5056017831 @default.
- W2953033242 hasAuthorship W2953033242A5056221557 @default.
- W2953033242 hasAuthorship W2953033242A5057494815 @default.
- W2953033242 hasAuthorship W2953033242A5077910870 @default.
- W2953033242 hasBestOaLocation W29530332421 @default.
- W2953033242 hasConcept C111335779 @default.
- W2953033242 hasConcept C119599485 @default.
- W2953033242 hasConcept C127413603 @default.
- W2953033242 hasConcept C160671074 @default.
- W2953033242 hasConcept C162324750 @default.
- W2953033242 hasConcept C187736073 @default.
- W2953033242 hasConcept C192562407 @default.
- W2953033242 hasConcept C24326235 @default.
- W2953033242 hasConcept C2524010 @default.
- W2953033242 hasConcept C2778638305 @default.
- W2953033242 hasConcept C2778820799 @default.
- W2953033242 hasConcept C2780288131 @default.
- W2953033242 hasConcept C33923547 @default.
- W2953033242 hasConcept C37977207 @default.
- W2953033242 hasConcept C41008148 @default.
- W2953033242 hasConcept C49040817 @default.
- W2953033242 hasConceptScore W2953033242C111335779 @default.
- W2953033242 hasConceptScore W2953033242C119599485 @default.
- W2953033242 hasConceptScore W2953033242C127413603 @default.
- W2953033242 hasConceptScore W2953033242C160671074 @default.
- W2953033242 hasConceptScore W2953033242C162324750 @default.
- W2953033242 hasConceptScore W2953033242C187736073 @default.
- W2953033242 hasConceptScore W2953033242C192562407 @default.
- W2953033242 hasConceptScore W2953033242C24326235 @default.
- W2953033242 hasConceptScore W2953033242C2524010 @default.
- W2953033242 hasConceptScore W2953033242C2778638305 @default.
- W2953033242 hasConceptScore W2953033242C2778820799 @default.
- W2953033242 hasConceptScore W2953033242C2780288131 @default.
- W2953033242 hasConceptScore W2953033242C33923547 @default.
- W2953033242 hasConceptScore W2953033242C37977207 @default.
- W2953033242 hasConceptScore W2953033242C41008148 @default.
- W2953033242 hasConceptScore W2953033242C49040817 @default.
- W2953033242 hasLocation W29530332421 @default.
- W2953033242 hasLocation W29530332422 @default.
- W2953033242 hasOpenAccess W2953033242 @default.
- W2953033242 hasPrimaryLocation W29530332421 @default.
- W2953033242 hasRelatedWork W1969570385 @default.
- W2953033242 hasRelatedWork W2080513946 @default.
- W2953033242 hasRelatedWork W2082419378 @default.
- W2953033242 hasRelatedWork W2095834124 @default.
- W2953033242 hasRelatedWork W2100299767 @default.
- W2953033242 hasRelatedWork W2149881015 @default.
- W2953033242 hasRelatedWork W2164354707 @default.
- W2953033242 hasRelatedWork W2330767926 @default.
- W2953033242 hasRelatedWork W2511280227 @default.
- W2953033242 hasRelatedWork W2899084033 @default.
- W2953033242 isParatext "false" @default.
- W2953033242 isRetracted "false" @default.
- W2953033242 magId "2953033242" @default.
- W2953033242 workType "article" @default.