Matches in SemOpenAlex for { <https://semopenalex.org/work/W2953183822> ?p ?o ?g. }
Showing items 1 to 43 of
43
with 100 items per page.
- W2953183822 abstract "A partir de SiH 4 , TaCl 5 , H 2 , HCl et Ar, depot de TaSi x pour des pressions comprises entre 100 mtorr et 1 torr et pour des temperatures comprises entre 620 et 700°C. On peut controler la stœchiometrie en ajustant les parametres pression, temperature et pression partielle des gaz reactifs. Les films deposes sur Si ou SiO 2 sont analyses par microscopie electronique, spectrometrie Auger et retrodiffusion Rutherford. Les concentrations des impuretes sont inferieures a 0,5%" @default.
- W2953183822 created "2019-06-27" @default.
- W2953183822 creator A5073514733 @default.
- W2953183822 date "1988-10-04" @default.
- W2953183822 modified "2023-09-25" @default.
- W2953183822 title "ChemInform Abstract: Low Pressure Chemical Vapor Deposition of Tantalum Silicide" @default.
- W2953183822 cites W1986909903 @default.
- W2953183822 doi "https://doi.org/10.1002/chin.198840300" @default.
- W2953183822 hasPublicationYear "1988" @default.
- W2953183822 type Work @default.
- W2953183822 sameAs 2953183822 @default.
- W2953183822 citedByCount "1" @default.
- W2953183822 crossrefType "journal-article" @default.
- W2953183822 hasAuthorship W2953183822A5073514733 @default.
- W2953183822 hasConcept C113196181 @default.
- W2953183822 hasConcept C121332964 @default.
- W2953183822 hasConcept C147789679 @default.
- W2953183822 hasConcept C178790620 @default.
- W2953183822 hasConcept C185592680 @default.
- W2953183822 hasConcept C2780901251 @default.
- W2953183822 hasConcept C30646810 @default.
- W2953183822 hasConcept C514619126 @default.
- W2953183822 hasConcept C544956773 @default.
- W2953183822 hasConcept C57410435 @default.
- W2953183822 hasConcept C97355855 @default.
- W2953183822 hasConceptScore W2953183822C113196181 @default.
- W2953183822 hasConceptScore W2953183822C121332964 @default.
- W2953183822 hasConceptScore W2953183822C147789679 @default.
- W2953183822 hasConceptScore W2953183822C178790620 @default.
- W2953183822 hasConceptScore W2953183822C185592680 @default.
- W2953183822 hasConceptScore W2953183822C2780901251 @default.
- W2953183822 hasConceptScore W2953183822C30646810 @default.
- W2953183822 hasConceptScore W2953183822C514619126 @default.
- W2953183822 hasConceptScore W2953183822C544956773 @default.
- W2953183822 hasConceptScore W2953183822C57410435 @default.
- W2953183822 hasConceptScore W2953183822C97355855 @default.
- W2953183822 hasLocation W29531838221 @default.
- W2953183822 hasOpenAccess W2953183822 @default.
- W2953183822 hasPrimaryLocation W29531838221 @default.
- W2953183822 isParatext "false" @default.
- W2953183822 isRetracted "false" @default.
- W2953183822 magId "2953183822" @default.
- W2953183822 workType "article" @default.