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• W2954982823 endingPage "413" @default.
• W2954982823 startingPage "408" @default.
• W2954982823 abstract "Abstract The effect of the energy level of injected ions on the formation of silicon carbide (SiC) films was investigated. These trials were based on the injection of a SiCH3+ ion beam into Si(100) substrates at 800 °C, using ion energies of 20, 100 or 200 eV. The specimens obtained following irradiation with these three energy levels were characterized by Fourier transform infrared spectroscopy, X-ray diffraction and X-ray photoelectron spectroscopy to confirm the deposition of 3C-SiC films. The data show similar carbon to silicon atomic ratios in all three films. However, analysis by atomic force microscopy demonstrated that the substrate surface obtained after 100 eV SiCH3+ ion irradiation was much smoother than those obtained after 20 or 200 eV irradiation." @default.
• W2954982823 created "2019-07-12" @default.
• W2954982823 creator A5012033210 @default.
• W2954982823 creator A5037328536 @default.
• W2954982823 creator A5041275701 @default.
• W2954982823 creator A5078213650 @default.
• W2954982823 creator A5082564878 @default.
• W2954982823 date "2019-09-01" @default.
• W2954982823 modified "2023-09-23" @default.
• W2954982823 title "Effects of injected ion energy on silicon carbide film formation by low-energy SiCH3+ beam irradiation" @default.
• W2954982823 cites W1506296867 @default.
• W2954982823 cites W1936593151 @default.
• W2954982823 cites W1965805242 @default.
• W2954982823 cites W1979551973 @default.
• W2954982823 cites W1980412805 @default.
• W2954982823 cites W1987917505 @default.
• W2954982823 cites W1998167243 @default.
• W2954982823 cites W2000194296 @default.
• W2954982823 cites W2005593486 @default.
• W2954982823 cites W2007150458 @default.
• W2954982823 cites W2024478762 @default.
• W2954982823 cites W2034474059 @default.
• W2954982823 cites W2038086701 @default.
• W2954982823 cites W2046215002 @default.
• W2954982823 cites W2054200750 @default.
• W2954982823 cites W2054632897 @default.
• W2954982823 cites W2065530777 @default.
• W2954982823 cites W2067467858 @default.
• W2954982823 cites W2077336580 @default.
• W2954982823 cites W2082816250 @default.
• W2954982823 cites W2094246053 @default.
• W2954982823 cites W2129464726 @default.
• W2954982823 cites W2294309947 @default.
• W2954982823 cites W2793573627 @default.
• W2954982823 cites W4242207333 @default.
• W2954982823 doi "https://doi.org/10.1016/j.tsf.2019.06.057" @default.
• W2954982823 hasPublicationYear "2019" @default.
• W2954982823 type Work @default.
• W2954982823 sameAs 2954982823 @default.
• W2954982823 citedByCount "5" @default.
• W2954982823 countsByYear W29549828232021 @default.
• W2954982823 countsByYear W29549828232022 @default.
• W2954982823 crossrefType "journal-article" @default.
• W2954982823 hasAuthorship W2954982823A5012033210 @default.
• W2954982823 hasAuthorship W2954982823A5037328536 @default.
• W2954982823 hasAuthorship W2954982823A5041275701 @default.
• W2954982823 hasAuthorship W2954982823A5078213650 @default.
• W2954982823 hasAuthorship W2954982823A5082564878 @default.
• W2954982823 hasConcept C111337013 @default.
• W2954982823 hasConcept C120665830 @default.
• W2954982823 hasConcept C121332964 @default.
• W2954982823 hasConcept C145148216 @default.
• W2954982823 hasConcept C168834538 @default.
• W2954982823 hasConcept C177322064 @default.
• W2954982823 hasConcept C178790620 @default.
• W2954982823 hasConcept C185544564 @default.
• W2954982823 hasConcept C185592680 @default.
• W2954982823 hasConcept C186370098 @default.
• W2954982823 hasConcept C191897082 @default.
• W2954982823 hasConcept C192562407 @default.
• W2954982823 hasConcept C2780722187 @default.
• W2954982823 hasConcept C49040817 @default.
• W2954982823 hasConcept C50774322 @default.
• W2954982823 hasConcept C544956773 @default.
• W2954982823 hasConcept C62520636 @default.
• W2954982823 hasConcept C93106096 @default.
• W2954982823 hasConceptScore W2954982823C111337013 @default.
• W2954982823 hasConceptScore W2954982823C120665830 @default.
• W2954982823 hasConceptScore W2954982823C121332964 @default.
• W2954982823 hasConceptScore W2954982823C145148216 @default.
• W2954982823 hasConceptScore W2954982823C168834538 @default.
• W2954982823 hasConceptScore W2954982823C177322064 @default.
• W2954982823 hasConceptScore W2954982823C178790620 @default.
• W2954982823 hasConceptScore W2954982823C185544564 @default.
• W2954982823 hasConceptScore W2954982823C185592680 @default.
• W2954982823 hasConceptScore W2954982823C186370098 @default.
• W2954982823 hasConceptScore W2954982823C191897082 @default.
• W2954982823 hasConceptScore W2954982823C192562407 @default.
• W2954982823 hasConceptScore W2954982823C2780722187 @default.
• W2954982823 hasConceptScore W2954982823C49040817 @default.
• W2954982823 hasConceptScore W2954982823C50774322 @default.
• W2954982823 hasConceptScore W2954982823C544956773 @default.
• W2954982823 hasConceptScore W2954982823C62520636 @default.
• W2954982823 hasConceptScore W2954982823C93106096 @default.
• W2954982823 hasLocation W29549828231 @default.
• W2954982823 hasOpenAccess W2954982823 @default.
• W2954982823 hasPrimaryLocation W29549828231 @default.
• W2954982823 hasRelatedWork W1987619134 @default.
• W2954982823 hasRelatedWork W2017250844 @default.
• W2954982823 hasRelatedWork W2039185137 @default.
• W2954982823 hasRelatedWork W2058924817 @default.
• W2954982823 hasRelatedWork W2073133358 @default.
• W2954982823 hasRelatedWork W2076555384 @default.
• W2954982823 hasRelatedWork W2084616009 @default.
• W2954982823 hasRelatedWork W2087643239 @default.
• W2954982823 hasRelatedWork W2969389267 @default.
• W2954982823 hasRelatedWork W3174374973 @default.
• W2954982823 hasVolume "685" @default.

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