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- W2955398832 abstract "We examined the effect of barrier thickness on Cu grain orientation control. We demonstrate that 5 nm thick HfN films which showed excellent barrier properties in our previous study are applicable to the underlayer for Cu grain orientation control. The strong (111)-oriented Cu layer is enhanced by using the HfN barrier with a 5 nm thickness. The obtained results bring about the compatibility of the high performance barrier with a suitable underlayer to obtain the highly-oriented Cu layer. These results are also valid for the development of barrier or underlayer materials for use in Si-LSI and three-dimensional LSI technology." @default.
- W2955398832 created "2019-07-12" @default.
- W2955398832 creator A5067585272 @default.
- W2955398832 creator A5069831005 @default.
- W2955398832 date "2019-06-26" @default.
- W2955398832 modified "2023-09-26" @default.
- W2955398832 title "Cu(111) preferential orientation on thin HfN film as a diffusion barrier" @default.
- W2955398832 cites W1973947465 @default.
- W2955398832 cites W1976244267 @default.
- W2955398832 cites W1982785824 @default.
- W2955398832 cites W2008076006 @default.
- W2955398832 cites W2016553181 @default.
- W2955398832 cites W2025188940 @default.
- W2955398832 cites W2026965293 @default.
- W2955398832 cites W2028978628 @default.
- W2955398832 cites W2048084832 @default.
- W2955398832 cites W2054041131 @default.
- W2955398832 cites W2054502920 @default.
- W2955398832 cites W2070653146 @default.
- W2955398832 cites W2079289690 @default.
- W2955398832 cites W2079860145 @default.
- W2955398832 cites W2115305484 @default.
- W2955398832 cites W2155715085 @default.
- W2955398832 cites W2163209793 @default.
- W2955398832 cites W2224122509 @default.
- W2955398832 cites W2515200587 @default.
- W2955398832 doi "https://doi.org/10.7567/1347-4065/ab1a29" @default.
- W2955398832 hasPublicationYear "2019" @default.
- W2955398832 type Work @default.
- W2955398832 sameAs 2955398832 @default.
- W2955398832 citedByCount "2" @default.
- W2955398832 countsByYear W29553988322020 @default.
- W2955398832 countsByYear W29553988322021 @default.
- W2955398832 crossrefType "journal-article" @default.
- W2955398832 hasAuthorship W2955398832A5067585272 @default.
- W2955398832 hasAuthorship W2955398832A5069831005 @default.
- W2955398832 hasConcept C159985019 @default.
- W2955398832 hasConcept C192562407 @default.
- W2955398832 hasConcept C2778648169 @default.
- W2955398832 hasConcept C2778836790 @default.
- W2955398832 hasConcept C2779227376 @default.
- W2955398832 hasConcept C2779833192 @default.
- W2955398832 hasConceptScore W2955398832C159985019 @default.
- W2955398832 hasConceptScore W2955398832C192562407 @default.
- W2955398832 hasConceptScore W2955398832C2778648169 @default.
- W2955398832 hasConceptScore W2955398832C2778836790 @default.
- W2955398832 hasConceptScore W2955398832C2779227376 @default.
- W2955398832 hasConceptScore W2955398832C2779833192 @default.
- W2955398832 hasLocation W29553988321 @default.
- W2955398832 hasOpenAccess W2955398832 @default.
- W2955398832 hasPrimaryLocation W29553988321 @default.
- W2955398832 hasRelatedWork W18773040 @default.
- W2955398832 hasRelatedWork W21581519 @default.
- W2955398832 hasRelatedWork W2215302 @default.
- W2955398832 hasRelatedWork W3203806 @default.
- W2955398832 hasRelatedWork W36363973 @default.
- W2955398832 hasRelatedWork W39849804 @default.
- W2955398832 hasRelatedWork W42177191 @default.
- W2955398832 hasRelatedWork W54806839 @default.
- W2955398832 hasRelatedWork W5688329 @default.
- W2955398832 hasRelatedWork W43019316 @default.
- W2955398832 isParatext "false" @default.
- W2955398832 isRetracted "false" @default.
- W2955398832 magId "2955398832" @default.
- W2955398832 workType "article" @default.