FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2955401528> ?p ?o ?g. }

• W2955401528 endingPage "395101" @default.
• W2955401528 startingPage "395101" @default.
• W2955401528 abstract "The spatial distribution of N2 plasma in the reactor chamber of an ion-filtered inductively-coupled-plasma metal-organic-chemical-vapor-deposition (IF-ICP-MOCVD) was studied. The selective absorption of the ion filter with a showerhead structure was simulated based on the simplification of the reaction model of N2 plasma and demonstrated by the optical emission spectroscopy and the growth of GaN film. The simulation shows that the number density of nitrogen ions on the pedestal was reduced by one order of magnitude with the showerhead ion filter compared to the counterpart without any ion filter, and that matches the measured spectra of OES. Meanwhile, N2(A3 )—a nitrogen metastable particle crucial to the growth of III-nitrides—keeps a moderate number density and the ratio of the number density of N2(A3 ) to the number density of nitrogen ions was increased up to 4–5 times as the showerhead ion filter has a relatively high transmission to nitrogen metastable particles. GaN films were successfully grown with our home-made IF-ICP-MOCVD at 480 °C, which shows great potential in the epitaxy of III-nitrides at low temperature." @default.
• W2955401528 created "2019-07-12" @default.
• W2955401528 creator A5002481882 @default.
• W2955401528 creator A5004411655 @default.
• W2955401528 creator A5015005766 @default.
• W2955401528 creator A5024076164 @default.
• W2955401528 creator A5024761739 @default.
• W2955401528 creator A5028883593 @default.
• W2955401528 creator A5042731770 @default.
• W2955401528 creator A5047447233 @default.
• W2955401528 creator A5052188139 @default.
• W2955401528 creator A5061063770 @default.
• W2955401528 creator A5090543342 @default.
• W2955401528 creator A5091368714 @default.
• W2955401528 date "2019-07-22" @default.
• W2955401528 modified "2023-10-16" @default.
• W2955401528 title "Spatial distribution study of a nitrogen plasma in an ion-filtered inductively coupled plasma used to grow GaN films" @default.
• W2955401528 cites W1482242795 @default.
• W2955401528 cites W156976079 @default.
• W2955401528 cites W1649930324 @default.
• W2955401528 cites W1967145734 @default.
• W2955401528 cites W1967638305 @default.
• W2955401528 cites W1976526552 @default.
• W2955401528 cites W1979763176 @default.
• W2955401528 cites W1985184531 @default.
• W2955401528 cites W1992165157 @default.
• W2955401528 cites W1995775832 @default.
• W2955401528 cites W2003910653 @default.
• W2955401528 cites W2006594033 @default.
• W2955401528 cites W2017071638 @default.
• W2955401528 cites W2021765124 @default.
• W2955401528 cites W2026914628 @default.
• W2955401528 cites W2034346293 @default.
• W2955401528 cites W2035241628 @default.
• W2955401528 cites W2045123636 @default.
• W2955401528 cites W2049610146 @default.
• W2955401528 cites W2062644627 @default.
• W2955401528 cites W2068369459 @default.
• W2955401528 cites W2068686097 @default.
• W2955401528 cites W2072494311 @default.
• W2955401528 cites W2125190467 @default.
• W2955401528 cites W2493880907 @default.
• W2955401528 cites W2515001986 @default.
• W2955401528 cites W2808500165 @default.
• W2955401528 cites W2886666669 @default.
• W2955401528 cites W2902950167 @default.
• W2955401528 cites W1986534423 @default.
• W2955401528 cites W2061885849 @default.
• W2955401528 doi "https://doi.org/10.1088/1361-6463/ab2ea3" @default.
• W2955401528 hasPublicationYear "2019" @default.
• W2955401528 type Work @default.
• W2955401528 sameAs 2955401528 @default.
• W2955401528 citedByCount "7" @default.
• W2955401528 countsByYear W29554015282019 @default.
• W2955401528 countsByYear W29554015282021 @default.
• W2955401528 countsByYear W29554015282022 @default.
• W2955401528 countsByYear W29554015282023 @default.
• W2955401528 crossrefType "journal-article" @default.
• W2955401528 hasAuthorship W2955401528A5002481882 @default.
• W2955401528 hasAuthorship W2955401528A5004411655 @default.
• W2955401528 hasAuthorship W2955401528A5015005766 @default.
• W2955401528 hasAuthorship W2955401528A5024076164 @default.
• W2955401528 hasAuthorship W2955401528A5024761739 @default.
• W2955401528 hasAuthorship W2955401528A5028883593 @default.
• W2955401528 hasAuthorship W2955401528A5042731770 @default.
• W2955401528 hasAuthorship W2955401528A5047447233 @default.
• W2955401528 hasAuthorship W2955401528A5052188139 @default.
• W2955401528 hasAuthorship W2955401528A5061063770 @default.
• W2955401528 hasAuthorship W2955401528A5090543342 @default.
• W2955401528 hasAuthorship W2955401528A5091368714 @default.
• W2955401528 hasConcept C107872376 @default.
• W2955401528 hasConcept C113196181 @default.
• W2955401528 hasConcept C121332964 @default.
• W2955401528 hasConcept C145148216 @default.
• W2955401528 hasConcept C162356407 @default.
• W2955401528 hasConcept C165697059 @default.
• W2955401528 hasConcept C178790620 @default.
• W2955401528 hasConcept C185544564 @default.
• W2955401528 hasConcept C185592680 @default.
• W2955401528 hasConcept C192562407 @default.
• W2955401528 hasConcept C43617362 @default.
• W2955401528 hasConcept C537208039 @default.
• W2955401528 hasConcept C82706917 @default.
• W2955401528 hasConcept C95974651 @default.
• W2955401528 hasConceptScore W2955401528C107872376 @default.
• W2955401528 hasConceptScore W2955401528C113196181 @default.
• W2955401528 hasConceptScore W2955401528C121332964 @default.
• W2955401528 hasConceptScore W2955401528C145148216 @default.
• W2955401528 hasConceptScore W2955401528C162356407 @default.
• W2955401528 hasConceptScore W2955401528C165697059 @default.
• W2955401528 hasConceptScore W2955401528C178790620 @default.
• W2955401528 hasConceptScore W2955401528C185544564 @default.
• W2955401528 hasConceptScore W2955401528C185592680 @default.
• W2955401528 hasConceptScore W2955401528C192562407 @default.
• W2955401528 hasConceptScore W2955401528C43617362 @default.
• W2955401528 hasConceptScore W2955401528C537208039 @default.
• W2955401528 hasConceptScore W2955401528C82706917 @default.
• W2955401528 hasConceptScore W2955401528C95974651 @default.

• next