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- W2955606957 abstract "Abstract A low frequency (∼100 kHz) distributed ferromagnetic enhanced inductively coupled plasma (FMICP) source with a separate supply of argon and chlorine into the main discharge chamber is proposed in order to obtain a large volume of dense (10 10 −10 12 cm -3 ) uniform plasma at low pressures (1−100 mTorr). Argon is activated by FMICP sources in U-shaped tubes and diffuses into the main chamber, mixing with chlorine. The Ar/Cl 2 mixture is also activated in the main discharge chamber by vortex alternating electric fields circulating in U-tubes and in the chamber. A separate supply of Ar into the side FMICP sources and Cl 2 directly into the main chamber can significantly enhance the power transfer efficiency into the main discharge chamber to be used for plasma etching of 450 mm wafers." @default.
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- W2955606957 date "2019-05-01" @default.
- W2955606957 modified "2023-09-27" @default.
- W2955606957 title "Development of a distributed ferromagnetic enhanced inductively coupled plasma source for plasma processing" @default.
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- W2955606957 doi "https://doi.org/10.1088/1742-6596/1243/1/012004" @default.
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