FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2956014975> ?p ?o ?g. }

• W2956014975 endingPage "1377" @default.
• W2956014975 startingPage "1372" @default.
• W2956014975 abstract "Top-gated, few-layer MoS2 transistors with HfO2 (6 nm)/Al2O3 (3 nm) gate dielectric stacks are fabricated and electrically characterized by capacitance–voltage (C–V) measurements to study electrically active traps (Dit) in the vicinity of the Al2O3/MoS2 interface. Devices with low Dit and high Dit are both observed in C–V characterization, and the impact of H2/N2 forming gas annealing at 300 and 400 °C on the Dit density and distribution is studied. A 300 °C anneal is able to reduce the Dit significantly, while the 400 °C anneal increases defects in the gate stack. Simulation with modeled defects suggests a sizable decrease in Dit, half the amount of positive fixed charge in the dielectric, and slightly increased unintentional doping in MoS2 after a 300 °C anneal. In the as-fabricated devices displaying high Dit levels, the energy distribution of the Dit located at the Al2O3/MoS2 interface is continuous from the conduction band edge of MoS2 down to 0.13–0.35 eV below the conduction band edge. A plausible Dit origin in our experiments could come from the unexpected oxygen atoms that fill the sulfur vacancies during the UV–O3 functionalization treatment. The border trap concentration in Al2O3 is the same, both before and after the anneal, suggesting a different origin of the border traps, possibly due to the low-temperature atomic-layer-deposited process." @default.
• W2956014975 created "2019-07-12" @default.
• W2956014975 creator A5003731777 @default.
• W2956014975 creator A5007504207 @default.
• W2956014975 creator A5029754464 @default.
• W2956014975 creator A5053550415 @default.
• W2956014975 creator A5056380296 @default.
• W2956014975 creator A5078398095 @default.
• W2956014975 creator A5081690749 @default.
• W2956014975 creator A5083166491 @default.
• W2956014975 creator A5088697502 @default.
• W2956014975 date "2019-06-24" @default.
• W2956014975 modified "2023-09-30" @default.
• W2956014975 title "Understanding the Impact of Annealing on Interface and Border Traps in the Cr/HfO₂/Al₂O₃/MoS₂ System" @default.
• W2956014975 cites W1665799149 @default.
• W2956014975 cites W1970919237 @default.
• W2956014975 cites W1992472539 @default.
• W2956014975 cites W2008147998 @default.
• W2956014975 cites W2020600888 @default.
• W2956014975 cites W2036124400 @default.
• W2956014975 cites W2037845847 @default.
• W2956014975 cites W2076727790 @default.
• W2956014975 cites W2077348258 @default.
• W2956014975 cites W2086933031 @default.
• W2956014975 cites W2101606767 @default.
• W2956014975 cites W2102041266 @default.
• W2956014975 cites W2112990349 @default.
• W2956014975 cites W2117562986 @default.
• W2956014975 cites W2123809476 @default.
• W2956014975 cites W2218224583 @default.
• W2956014975 cites W2322923573 @default.
• W2956014975 cites W2327038069 @default.
• W2956014975 cites W2329895733 @default.
• W2956014975 cites W2344198464 @default.
• W2956014975 cites W2344764410 @default.
• W2956014975 cites W2374970305 @default.
• W2956014975 cites W2572405127 @default.
• W2956014975 cites W2583692340 @default.
• W2956014975 cites W2610683975 @default.
• W2956014975 cites W2709572233 @default.
• W2956014975 cites W2737860679 @default.
• W2956014975 cites W2773867118 @default.
• W2956014975 cites W2792758213 @default.
• W2956014975 cites W2795285915 @default.
• W2956014975 cites W2809407184 @default.
• W2956014975 doi "https://doi.org/10.1021/acsaelm.8b00103" @default.
• W2956014975 hasPublicationYear "2019" @default.
• W2956014975 type Work @default.
• W2956014975 sameAs 2956014975 @default.
• W2956014975 citedByCount "13" @default.
• W2956014975 countsByYear W29560149752020 @default.
• W2956014975 countsByYear W29560149752021 @default.
• W2956014975 countsByYear W29560149752022 @default.
• W2956014975 countsByYear W29560149752023 @default.
• W2956014975 crossrefType "journal-article" @default.
• W2956014975 hasAuthorship W2956014975A5003731777 @default.
• W2956014975 hasAuthorship W2956014975A5007504207 @default.
• W2956014975 hasAuthorship W2956014975A5029754464 @default.
• W2956014975 hasAuthorship W2956014975A5053550415 @default.
• W2956014975 hasAuthorship W2956014975A5056380296 @default.
• W2956014975 hasAuthorship W2956014975A5078398095 @default.
• W2956014975 hasAuthorship W2956014975A5081690749 @default.
• W2956014975 hasAuthorship W2956014975A5083166491 @default.
• W2956014975 hasAuthorship W2956014975A5088697502 @default.
• W2956014975 hasConcept C113196181 @default.
• W2956014975 hasConcept C119599485 @default.
• W2956014975 hasConcept C121332964 @default.
• W2956014975 hasConcept C127413603 @default.
• W2956014975 hasConcept C133386390 @default.
• W2956014975 hasConcept C147120987 @default.
• W2956014975 hasConcept C159985019 @default.
• W2956014975 hasConcept C165801399 @default.
• W2956014975 hasConcept C166972891 @default.
• W2956014975 hasConcept C172385210 @default.
• W2956014975 hasConcept C185592680 @default.
• W2956014975 hasConcept C192562407 @default.
• W2956014975 hasConcept C195370968 @default.
• W2956014975 hasConcept C27067764 @default.
• W2956014975 hasConcept C2777855556 @default.
• W2956014975 hasConcept C36003996 @default.
• W2956014975 hasConcept C43617362 @default.
• W2956014975 hasConcept C49040817 @default.
• W2956014975 hasConcept C57863236 @default.
• W2956014975 hasConcept C62520636 @default.
• W2956014975 hasConceptScore W2956014975C113196181 @default.
• W2956014975 hasConceptScore W2956014975C119599485 @default.
• W2956014975 hasConceptScore W2956014975C121332964 @default.
• W2956014975 hasConceptScore W2956014975C127413603 @default.
• W2956014975 hasConceptScore W2956014975C133386390 @default.
• W2956014975 hasConceptScore W2956014975C147120987 @default.
• W2956014975 hasConceptScore W2956014975C159985019 @default.
• W2956014975 hasConceptScore W2956014975C165801399 @default.
• W2956014975 hasConceptScore W2956014975C166972891 @default.
• W2956014975 hasConceptScore W2956014975C172385210 @default.
• W2956014975 hasConceptScore W2956014975C185592680 @default.
• W2956014975 hasConceptScore W2956014975C192562407 @default.
• W2956014975 hasConceptScore W2956014975C195370968 @default.
• W2956014975 hasConceptScore W2956014975C27067764 @default.

• next