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• W2958459715 abstract "Carbon dioxide ( <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>C</mml:mi> <mml:mi mathvariant=normal>O</mml:mi> </mml:mrow> <mml:mn>2</mml:mn> </mml:msub> </mml:mrow> </mml:math> ) is a gas vital for life on Earth. It is also a waste product of human activities and is widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>C</mml:mi> <mml:mi mathvariant=normal>O</mml:mi> </mml:mrow> <mml:mn>2</mml:mn> </mml:msub> </mml:mrow> </mml:math> provide high selectivity, but their large size and high cost limit their use. In this Letter, we demonstrate <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>C</mml:mi> <mml:mi mathvariant=normal>O</mml:mi> </mml:mrow> <mml:mn>2</mml:mn> </mml:msub> </mml:mrow> </mml:math> gas sensing at 4.2 µm wavelength using an integrated silicon waveguide, featuring a sensitivity to <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>C</mml:mi> <mml:mi mathvariant=normal>O</mml:mi> </mml:mrow> <mml:mn>2</mml:mn> </mml:msub> </mml:mrow> </mml:math> of 44% that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML display=inline> <mml:mrow class=MJX-TeXAtom-ORD> <mml:msub> <mml:mrow class=MJX-TeXAtom-ORD> <mml:mi mathvariant=normal>C</mml:mi> <mml:mi mathvariant=normal>O</mml:mi> </mml:mrow> <mml:mn>2</mml:mn> </mml:msub> </mml:mrow> </mml:math> sensors for distributed environmental monitoring, personal safety, and medical and high-volume consumer applications." @default.
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• W2958459715 date "2019-12-19" @default.
• W2958459715 modified "2023-10-17" @default.
• W2958459715 title "Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide" @default.
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