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- W2959434551 abstract "~Received 19 June 2000; accepted for publication 7 August 2000!We present results of ab initio calculations for the structure and energetics of boron-interstitialclusters in Si and a respective continuum model for the nucleation, growth, and dissolution of suchclusters. The structure of the clusters and their possible relationship to boron precipitates andinterstitial-cluster formation are discussed. We find that neither the local-density approximation northe generalized-gradient approximation to the density-functional theory result in energetics thatpredict annealing and activation experiments perfectly well. However, gentle refitting of thenumbers results in a model with good predictive qualities. © 2000 American Institute of Physics.@S0003-6951~00!04539-3#Ion implantation is currently the method of choice forintroducing dopants such as boron into silicon." @default.
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- W2959434551 date "2001-03-19" @default.
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- W2959434551 title "Ab Initio Modeling of Boron Clustering in Silicon" @default.
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