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• W2960993351 abstract "Novel positive-tone hybrid resists developed by vapor-phase inorganic infiltration feature fully tunable resist performance parameters and high-aspect-ratio pattern transfer capability." @default.
• W2960993351 created "2019-07-23" @default.
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• W2960993351 date "2019-01-01" @default.
• W2960993351 modified "2023-09-26" @default.
• W2960993351 title "Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists" @default.
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• W2960993351 doi "https://doi.org/10.1039/c9tc02974e" @default.
• W2960993351 hasPublicationYear "2019" @default.
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