Matches in SemOpenAlex for { <https://semopenalex.org/work/W2962627496> ?p ?o ?g. }
- W2962627496 endingPage "107466" @default.
- W2962627496 startingPage "107466" @default.
- W2962627496 abstract "We report on growth of polycrystalline diamond (PCD) by chemical vapor deposition (CVD) in a microwave plasma reactor under high absorbed microwave power density (MWPD) and high pressures, in conditions more typical for single crystal diamond epitaxy. The growth rates as high as 30–36 μm/h have been achieved in CH4-H2 mixtures at pressure of 320 Torr and MWPD of ~700 W/cm3 even at relatively low (3%) CH4 concentration, using PCD substrates with diameter of 5–20 mm and different textures. The structure and quality of the produced PCD thick films were assessed with SEM, Raman and X-ray diffraction. The plasma shapes and spatial profiles of species (excited atomic hydrogen and C2 dimer) were characterized with spatially resolved optical emission spectroscopy (OES) at moderate and high MWPD. The maximum rotational gas temperature Tg significantly enhanced to 3700 K in the latter case (675 W/cm3) compared with Tg ≈ 3100 K for lower pressure and MWPD (100 Torr, 160 W/cm3), being in agreement with the obtained high growth rates at high pressures. Analysis of numerous literature data on PCD growth rate vs substrate size in MPCVD reactors reveals a clear trend of enhanced growth rate with diminishing of the substrate dimension, our findings further confirming this tendency indirectly related to a change in absorbed power density." @default.
- W2962627496 created "2019-07-23" @default.
- W2962627496 creator A5004202325 @default.
- W2962627496 creator A5016792477 @default.
- W2962627496 creator A5030128272 @default.
- W2962627496 creator A5031916834 @default.
- W2962627496 creator A5041239081 @default.
- W2962627496 creator A5042849855 @default.
- W2962627496 creator A5043074487 @default.
- W2962627496 creator A5046822363 @default.
- W2962627496 creator A5048650202 @default.
- W2962627496 creator A5064249293 @default.
- W2962627496 creator A5070422908 @default.
- W2962627496 creator A5073242203 @default.
- W2962627496 creator A5074515722 @default.
- W2962627496 creator A5080767554 @default.
- W2962627496 date "2019-08-01" @default.
- W2962627496 modified "2023-09-26" @default.
- W2962627496 title "Enhanced deposition rate of polycrystalline CVD diamond at high microwave power densities" @default.
- W2962627496 cites W1477543683 @default.
- W2962627496 cites W1506003430 @default.
- W2962627496 cites W1919556371 @default.
- W2962627496 cites W1969089298 @default.
- W2962627496 cites W1971913247 @default.
- W2962627496 cites W1974692948 @default.
- W2962627496 cites W1990962148 @default.
- W2962627496 cites W1994687326 @default.
- W2962627496 cites W2001236033 @default.
- W2962627496 cites W2004728407 @default.
- W2962627496 cites W2011083243 @default.
- W2962627496 cites W2018266149 @default.
- W2962627496 cites W2020356156 @default.
- W2962627496 cites W2031033704 @default.
- W2962627496 cites W2033639875 @default.
- W2962627496 cites W2036105257 @default.
- W2962627496 cites W2036267434 @default.
- W2962627496 cites W2037910006 @default.
- W2962627496 cites W2056924160 @default.
- W2962627496 cites W2066682947 @default.
- W2962627496 cites W2067693627 @default.
- W2962627496 cites W2068746653 @default.
- W2962627496 cites W2074359051 @default.
- W2962627496 cites W2077663275 @default.
- W2962627496 cites W2077854242 @default.
- W2962627496 cites W2079423693 @default.
- W2962627496 cites W2084529687 @default.
- W2962627496 cites W2087697186 @default.
- W2962627496 cites W2116204155 @default.
- W2962627496 cites W2131571439 @default.
- W2962627496 cites W2167364711 @default.
- W2962627496 cites W2199750937 @default.
- W2962627496 cites W2299073603 @default.
- W2962627496 cites W2323741572 @default.
- W2962627496 cites W2345879112 @default.
- W2962627496 cites W2379312549 @default.
- W2962627496 cites W2491303184 @default.
- W2962627496 cites W2567813176 @default.
- W2962627496 cites W2589799988 @default.
- W2962627496 cites W2596269469 @default.
- W2962627496 cites W2606169523 @default.
- W2962627496 cites W2739506021 @default.
- W2962627496 cites W2749731179 @default.
- W2962627496 cites W2759129447 @default.
- W2962627496 cites W2783819388 @default.
- W2962627496 cites W2801700563 @default.
- W2962627496 cites W2805641303 @default.
- W2962627496 cites W2807491534 @default.
- W2962627496 cites W2894509061 @default.
- W2962627496 cites W3100806243 @default.
- W2962627496 doi "https://doi.org/10.1016/j.diamond.2019.107466" @default.
- W2962627496 hasPublicationYear "2019" @default.
- W2962627496 type Work @default.
- W2962627496 sameAs 2962627496 @default.
- W2962627496 citedByCount "21" @default.
- W2962627496 countsByYear W29626274962019 @default.
- W2962627496 countsByYear W29626274962020 @default.
- W2962627496 countsByYear W29626274962021 @default.
- W2962627496 countsByYear W29626274962022 @default.
- W2962627496 countsByYear W29626274962023 @default.
- W2962627496 crossrefType "journal-article" @default.
- W2962627496 hasAuthorship W2962627496A5004202325 @default.
- W2962627496 hasAuthorship W2962627496A5016792477 @default.
- W2962627496 hasAuthorship W2962627496A5030128272 @default.
- W2962627496 hasAuthorship W2962627496A5031916834 @default.
- W2962627496 hasAuthorship W2962627496A5041239081 @default.
- W2962627496 hasAuthorship W2962627496A5042849855 @default.
- W2962627496 hasAuthorship W2962627496A5043074487 @default.
- W2962627496 hasAuthorship W2962627496A5046822363 @default.
- W2962627496 hasAuthorship W2962627496A5048650202 @default.
- W2962627496 hasAuthorship W2962627496A5064249293 @default.
- W2962627496 hasAuthorship W2962627496A5070422908 @default.
- W2962627496 hasAuthorship W2962627496A5073242203 @default.
- W2962627496 hasAuthorship W2962627496A5074515722 @default.
- W2962627496 hasAuthorship W2962627496A5080767554 @default.
- W2962627496 hasConcept C111368507 @default.
- W2962627496 hasConcept C113196181 @default.
- W2962627496 hasConcept C120665830 @default.
- W2962627496 hasConcept C121332964 @default.