Matches in SemOpenAlex for { <https://semopenalex.org/work/W2963548909> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2963548909 abstract "In integrated circuits manufacturing, specific structures are used as tools to evaluate the quality of the lithographic process, and the shape of these structures is often described by a few parameters, of which in particular the sidewall angle suffers from considerable inaccuracies. Using scalar diffraction theory, we investigate whether a properly shaped cylindrically focused probing beam could increase the ability to detect tiny changes in this angle in the case of a cliff-like structure, modeled as a phase object. This paper describes the theoretical formulation used to calculate the optimized beam and compares its performance with the case of a focused plane wave." @default.
- W2963548909 created "2019-07-30" @default.
- W2963548909 creator A5012673296 @default.
- W2963548909 creator A5030281266 @default.
- W2963548909 date "2016-12-14" @default.
- W2963548909 modified "2023-09-23" @default.
- W2963548909 title "Amplitude and phase beam shaping for highest sensitivity in sidewall angle detection" @default.
- W2963548909 cites W1970160589 @default.
- W2963548909 cites W1985231831 @default.
- W2963548909 cites W2017094316 @default.
- W2963548909 cites W2017408602 @default.
- W2963548909 cites W2019797038 @default.
- W2963548909 cites W2042739619 @default.
- W2963548909 cites W2047698382 @default.
- W2963548909 cites W2048521851 @default.
- W2963548909 cites W2062040793 @default.
- W2963548909 cites W2064535643 @default.
- W2963548909 cites W2071388456 @default.
- W2963548909 cites W2083504402 @default.
- W2963548909 cites W2086459821 @default.
- W2963548909 cites W2088355057 @default.
- W2963548909 cites W2091921027 @default.
- W2963548909 cites W2100984179 @default.
- W2963548909 cites W2139898780 @default.
- W2963548909 cites W2228673094 @default.
- W2963548909 doi "https://doi.org/10.1364/josaa.34.000052" @default.
- W2963548909 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/28059224" @default.
- W2963548909 hasPublicationYear "2016" @default.
- W2963548909 type Work @default.
- W2963548909 sameAs 2963548909 @default.
- W2963548909 citedByCount "1" @default.
- W2963548909 countsByYear W29635489092019 @default.
- W2963548909 crossrefType "journal-article" @default.
- W2963548909 hasAuthorship W2963548909A5012673296 @default.
- W2963548909 hasAuthorship W2963548909A5030281266 @default.
- W2963548909 hasBestOaLocation W29635489092 @default.
- W2963548909 hasConcept C120665830 @default.
- W2963548909 hasConcept C121332964 @default.
- W2963548909 hasConcept C127413603 @default.
- W2963548909 hasConcept C168834538 @default.
- W2963548909 hasConcept C170222088 @default.
- W2963548909 hasConcept C180205008 @default.
- W2963548909 hasConcept C192562407 @default.
- W2963548909 hasConcept C204223013 @default.
- W2963548909 hasConcept C207114421 @default.
- W2963548909 hasConcept C21200559 @default.
- W2963548909 hasConcept C24326235 @default.
- W2963548909 hasConcept C2524010 @default.
- W2963548909 hasConcept C33923547 @default.
- W2963548909 hasConcept C44280652 @default.
- W2963548909 hasConcept C57691317 @default.
- W2963548909 hasConcept C62520636 @default.
- W2963548909 hasConceptScore W2963548909C120665830 @default.
- W2963548909 hasConceptScore W2963548909C121332964 @default.
- W2963548909 hasConceptScore W2963548909C127413603 @default.
- W2963548909 hasConceptScore W2963548909C168834538 @default.
- W2963548909 hasConceptScore W2963548909C170222088 @default.
- W2963548909 hasConceptScore W2963548909C180205008 @default.
- W2963548909 hasConceptScore W2963548909C192562407 @default.
- W2963548909 hasConceptScore W2963548909C204223013 @default.
- W2963548909 hasConceptScore W2963548909C207114421 @default.
- W2963548909 hasConceptScore W2963548909C21200559 @default.
- W2963548909 hasConceptScore W2963548909C24326235 @default.
- W2963548909 hasConceptScore W2963548909C2524010 @default.
- W2963548909 hasConceptScore W2963548909C33923547 @default.
- W2963548909 hasConceptScore W2963548909C44280652 @default.
- W2963548909 hasConceptScore W2963548909C57691317 @default.
- W2963548909 hasConceptScore W2963548909C62520636 @default.
- W2963548909 hasLocation W29635489091 @default.
- W2963548909 hasLocation W29635489092 @default.
- W2963548909 hasLocation W29635489093 @default.
- W2963548909 hasOpenAccess W2963548909 @default.
- W2963548909 hasPrimaryLocation W29635489091 @default.
- W2963548909 hasRelatedWork W1988486734 @default.
- W2963548909 hasRelatedWork W1992071757 @default.
- W2963548909 hasRelatedWork W2023929129 @default.
- W2963548909 hasRelatedWork W2025652258 @default.
- W2963548909 hasRelatedWork W2060376089 @default.
- W2963548909 hasRelatedWork W2062728192 @default.
- W2963548909 hasRelatedWork W2093716391 @default.
- W2963548909 hasRelatedWork W2171295824 @default.
- W2963548909 hasRelatedWork W2361617054 @default.
- W2963548909 hasRelatedWork W2498944426 @default.
- W2963548909 isParatext "false" @default.
- W2963548909 isRetracted "false" @default.
- W2963548909 magId "2963548909" @default.
- W2963548909 workType "article" @default.