Matches in SemOpenAlex for { <https://semopenalex.org/work/W2963593675> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2963593675 abstract "AlN/air-gap distributed Bragg reflectors were fabricated using selective wet etch to remove the sacrificial Al layers. AlN/Al superlattice was prepared on a Si substrate via reactive radio frequency magnetron sputtering. Scan- ning electron microscopy was also performed to determine the AlN and Al thickness layers. The AlN/Al superlattice was annealed to improved the crystallinity of AlN layers and it was characterized using x-ray diffraction. Crystalized AlN (002) was confirmed from the x-ray rocking curve. Finally, we performed reflectivity measurements of the fabricated AlN/air-gap DBRs and it was recorded to be approximately 47% at the peak reflectivity." @default.
- W2963593675 created "2019-07-30" @default.
- W2963593675 creator A5019344315 @default.
- W2963593675 creator A5066291774 @default.
- W2963593675 creator A5069340467 @default.
- W2963593675 creator A5082280288 @default.
- W2963593675 date "2012-10-22" @default.
- W2963593675 modified "2023-09-23" @default.
- W2963593675 title "Fabrication of AlN/Air-gap distributed Bragg reflectors from wet etching of sacrificial Aluminum layers" @default.
- W2963593675 hasPublicationYear "2012" @default.
- W2963593675 type Work @default.
- W2963593675 sameAs 2963593675 @default.
- W2963593675 citedByCount "0" @default.
- W2963593675 crossrefType "journal-article" @default.
- W2963593675 hasAuthorship W2963593675A5019344315 @default.
- W2963593675 hasAuthorship W2963593675A5066291774 @default.
- W2963593675 hasAuthorship W2963593675A5069340467 @default.
- W2963593675 hasAuthorship W2963593675A5082280288 @default.
- W2963593675 hasConcept C100460472 @default.
- W2963593675 hasConcept C105382558 @default.
- W2963593675 hasConcept C111368507 @default.
- W2963593675 hasConcept C120665830 @default.
- W2963593675 hasConcept C121332964 @default.
- W2963593675 hasConcept C127313418 @default.
- W2963593675 hasConcept C136525101 @default.
- W2963593675 hasConcept C142724271 @default.
- W2963593675 hasConcept C159985019 @default.
- W2963593675 hasConcept C171250308 @default.
- W2963593675 hasConcept C181966813 @default.
- W2963593675 hasConcept C19067145 @default.
- W2963593675 hasConcept C192562407 @default.
- W2963593675 hasConcept C204787440 @default.
- W2963593675 hasConcept C207114421 @default.
- W2963593675 hasConcept C22423302 @default.
- W2963593675 hasConcept C2777289219 @default.
- W2963593675 hasConcept C2779227376 @default.
- W2963593675 hasConcept C46275449 @default.
- W2963593675 hasConcept C49040817 @default.
- W2963593675 hasConcept C513153333 @default.
- W2963593675 hasConcept C61427134 @default.
- W2963593675 hasConcept C71924100 @default.
- W2963593675 hasConceptScore W2963593675C100460472 @default.
- W2963593675 hasConceptScore W2963593675C105382558 @default.
- W2963593675 hasConceptScore W2963593675C111368507 @default.
- W2963593675 hasConceptScore W2963593675C120665830 @default.
- W2963593675 hasConceptScore W2963593675C121332964 @default.
- W2963593675 hasConceptScore W2963593675C127313418 @default.
- W2963593675 hasConceptScore W2963593675C136525101 @default.
- W2963593675 hasConceptScore W2963593675C142724271 @default.
- W2963593675 hasConceptScore W2963593675C159985019 @default.
- W2963593675 hasConceptScore W2963593675C171250308 @default.
- W2963593675 hasConceptScore W2963593675C181966813 @default.
- W2963593675 hasConceptScore W2963593675C19067145 @default.
- W2963593675 hasConceptScore W2963593675C192562407 @default.
- W2963593675 hasConceptScore W2963593675C204787440 @default.
- W2963593675 hasConceptScore W2963593675C207114421 @default.
- W2963593675 hasConceptScore W2963593675C22423302 @default.
- W2963593675 hasConceptScore W2963593675C2777289219 @default.
- W2963593675 hasConceptScore W2963593675C2779227376 @default.
- W2963593675 hasConceptScore W2963593675C46275449 @default.
- W2963593675 hasConceptScore W2963593675C49040817 @default.
- W2963593675 hasConceptScore W2963593675C513153333 @default.
- W2963593675 hasConceptScore W2963593675C61427134 @default.
- W2963593675 hasConceptScore W2963593675C71924100 @default.
- W2963593675 hasLocation W29635936751 @default.
- W2963593675 hasOpenAccess W2963593675 @default.
- W2963593675 hasPrimaryLocation W29635936751 @default.
- W2963593675 hasRelatedWork W1977079942 @default.
- W2963593675 hasRelatedWork W1979567107 @default.
- W2963593675 hasRelatedWork W2001269015 @default.
- W2963593675 hasRelatedWork W2018067266 @default.
- W2963593675 hasRelatedWork W2065300737 @default.
- W2963593675 hasRelatedWork W2079970518 @default.
- W2963593675 hasRelatedWork W2347303000 @default.
- W2963593675 hasRelatedWork W2389279695 @default.
- W2963593675 hasRelatedWork W2567571813 @default.
- W2963593675 hasRelatedWork W2570978943 @default.
- W2963593675 hasRelatedWork W2575957610 @default.
- W2963593675 hasRelatedWork W2780596417 @default.
- W2963593675 hasRelatedWork W2826973190 @default.
- W2963593675 hasRelatedWork W2909941169 @default.
- W2963593675 hasRelatedWork W2921731928 @default.
- W2963593675 hasRelatedWork W2937782650 @default.
- W2963593675 hasRelatedWork W2993781579 @default.
- W2963593675 hasRelatedWork W3012753909 @default.
- W2963593675 hasRelatedWork W3020666581 @default.
- W2963593675 hasRelatedWork W3197824088 @default.
- W2963593675 isParatext "false" @default.
- W2963593675 isRetracted "false" @default.
- W2963593675 magId "2963593675" @default.
- W2963593675 workType "article" @default.