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- W2963691036 abstract "Short (40–200 μs) single focused CO2 laser pulses of energy ≳100 μJ were used to fabricate high quality concave micromirror templates on silica and fluoride glass. The ablated features have diameters of ≈20–100 μm and average root-mean-square (RMS) surface microroughness near their center of less than 0.2 nm. Temporally monitoring the fabrication process revealed that it proceeds on a time scale shorter than the laser pulse duration. We implement a fast feedback control loop (≈20 kHz bandwidth) based on the light emitted by the sample that ensures an RMS size dispersion of less than 5% in arrays on chips or in individually fabricated features on an optical fiber tip, a significant improvement over previous approaches using longer pulses and open loop operation." @default.
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- W2963691036 date "2011-12-01" @default.
- W2963691036 modified "2023-09-23" @default.
- W2963691036 title "Feedback-controlled laser fabrication of micromirror substrates" @default.
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- W2963691036 doi "https://doi.org/10.1063/1.3671291" @default.
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