Matches in SemOpenAlex for { <https://semopenalex.org/work/W2964272073> ?p ?o ?g. }
- W2964272073 endingPage "435301" @default.
- W2964272073 startingPage "435301" @default.
- W2964272073 abstract "In this work we present the results of a Hard X-ray Photoelectron Spectroscopy (HAXPES) study on the creation of metallic copper layers via metal-salt infiltration into a poly-2-vinylpyridine (P2VP) film. Metal salt inclusion is a wet chemistry process which allows for the fabrication of both metal and metal oxide films by means of infiltrating a receptive polymer thin film with metal salt precursors. A copper infiltrated P2VP film was subject to UV/Ozone treatment to form copper oxide and annealed in-vacuo to reduce the film to metallic copper. HAXPES and transmission electron microscope (TEM) measurements were used to study the polymer film before and after metal salt infiltration, along with analysis of the copper oxide created after UV/Ozone treatment. The results show successful infiltration of the metal salt into the polymer film, as well as complete conversion to copper oxide following UV/Ozone treatment and reduction to metallic copper with a subsequent in-situ anneal, which demonstrates the ability of the technique for the creation of several key integrated circuit features." @default.
- W2964272073 created "2019-07-30" @default.
- W2964272073 creator A5003311069 @default.
- W2964272073 creator A5014147752 @default.
- W2964272073 creator A5014208755 @default.
- W2964272073 creator A5034819406 @default.
- W2964272073 creator A5035398506 @default.
- W2964272073 creator A5038878125 @default.
- W2964272073 creator A5064394110 @default.
- W2964272073 creator A5066571484 @default.
- W2964272073 creator A5068284513 @default.
- W2964272073 creator A5086724472 @default.
- W2964272073 date "2019-08-08" @default.
- W2964272073 modified "2023-10-11" @default.
- W2964272073 title "Hard x-ray photoelectron spectroscopy study of copper formation by metal salt inclusion in a polymer film" @default.
- W2964272073 cites W1963892104 @default.
- W2964272073 cites W1969018279 @default.
- W2964272073 cites W1975816343 @default.
- W2964272073 cites W1977669162 @default.
- W2964272073 cites W1977707603 @default.
- W2964272073 cites W1985286586 @default.
- W2964272073 cites W1987310618 @default.
- W2964272073 cites W1998300739 @default.
- W2964272073 cites W1999417288 @default.
- W2964272073 cites W2001883252 @default.
- W2964272073 cites W2002555537 @default.
- W2964272073 cites W2029006633 @default.
- W2964272073 cites W2034548853 @default.
- W2964272073 cites W2036815346 @default.
- W2964272073 cites W2052952734 @default.
- W2964272073 cites W2064115521 @default.
- W2964272073 cites W2072187870 @default.
- W2964272073 cites W2078694734 @default.
- W2964272073 cites W2080688193 @default.
- W2964272073 cites W2085667771 @default.
- W2964272073 cites W2098547240 @default.
- W2964272073 cites W2099800060 @default.
- W2964272073 cites W2100493087 @default.
- W2964272073 cites W2108953022 @default.
- W2964272073 cites W2114708340 @default.
- W2964272073 cites W2118625035 @default.
- W2964272073 cites W2149407611 @default.
- W2964272073 cites W2152718092 @default.
- W2964272073 cites W2159877158 @default.
- W2964272073 cites W2166771548 @default.
- W2964272073 cites W2273886880 @default.
- W2964272073 cites W2555850477 @default.
- W2964272073 cites W2604868824 @default.
- W2964272073 cites W2605671272 @default.
- W2964272073 cites W2612369154 @default.
- W2964272073 cites W2617015175 @default.
- W2964272073 cites W2727552524 @default.
- W2964272073 cites W2758562584 @default.
- W2964272073 cites W2762647979 @default.
- W2964272073 cites W2763024962 @default.
- W2964272073 cites W2796049487 @default.
- W2964272073 cites W2810313375 @default.
- W2964272073 doi "https://doi.org/10.1088/1361-6463/ab35b2" @default.
- W2964272073 hasPublicationYear "2019" @default.
- W2964272073 type Work @default.
- W2964272073 sameAs 2964272073 @default.
- W2964272073 citedByCount "10" @default.
- W2964272073 countsByYear W29642720732019 @default.
- W2964272073 countsByYear W29642720732020 @default.
- W2964272073 countsByYear W29642720732021 @default.
- W2964272073 countsByYear W29642720732022 @default.
- W2964272073 countsByYear W29642720732023 @default.
- W2964272073 crossrefType "journal-article" @default.
- W2964272073 hasAuthorship W2964272073A5003311069 @default.
- W2964272073 hasAuthorship W2964272073A5014147752 @default.
- W2964272073 hasAuthorship W2964272073A5014208755 @default.
- W2964272073 hasAuthorship W2964272073A5034819406 @default.
- W2964272073 hasAuthorship W2964272073A5035398506 @default.
- W2964272073 hasAuthorship W2964272073A5038878125 @default.
- W2964272073 hasAuthorship W2964272073A5064394110 @default.
- W2964272073 hasAuthorship W2964272073A5066571484 @default.
- W2964272073 hasAuthorship W2964272073A5068284513 @default.
- W2964272073 hasAuthorship W2964272073A5086724472 @default.
- W2964272073 hasBestOaLocation W29642720733 @default.
- W2964272073 hasConcept C107872376 @default.
- W2964272073 hasConcept C109359841 @default.
- W2964272073 hasConcept C113196181 @default.
- W2964272073 hasConcept C127413603 @default.
- W2964272073 hasConcept C147789679 @default.
- W2964272073 hasConcept C159985019 @default.
- W2964272073 hasConcept C175708663 @default.
- W2964272073 hasConcept C185592680 @default.
- W2964272073 hasConcept C191897082 @default.
- W2964272073 hasConcept C192562407 @default.
- W2964272073 hasConcept C199289684 @default.
- W2964272073 hasConcept C2776371256 @default.
- W2964272073 hasConcept C42360764 @default.
- W2964272073 hasConcept C521977710 @default.
- W2964272073 hasConcept C544153396 @default.
- W2964272073 hasConcept C544778455 @default.
- W2964272073 hasConceptScore W2964272073C107872376 @default.
- W2964272073 hasConceptScore W2964272073C109359841 @default.
- W2964272073 hasConceptScore W2964272073C113196181 @default.