Matches in SemOpenAlex for { <https://semopenalex.org/work/W2964676875> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2964676875 endingPage "1578" @default.
- W2964676875 startingPage "1575" @default.
- W2964676875 abstract "The thermal stability and contact property of Ti/p+-Ge0.95Sn0.05 contact are investigated for the first time. Sn segregation is observed under the Ti/GeSn interface after the post-metal anneal (PMA). The specific contact resistivity $rho _{c}$ of Ti/p+-Ge0.95Sn0.05 contact decreases significantly after PMA. Ultra-low $rho _{c}$ of $9.3times 10^{-10},,Omega $ -cm2 is achieved after PMA at 450 °C for 30 s for Ti/p+-Ge0.95Sn0.05 contact, which is about 4 times smaller than that of the as-deposited Ti/p+-Ge0.95Sn0.05 contact. Further increase in the PMA temperature to 500 °C leads to severe Ti grooving and contact-to-contact variations while the ultra-low $rho _{c}$ is maintained after PMA at 420 °C for 1 hour." @default.
- W2964676875 created "2019-08-13" @default.
- W2964676875 creator A5014399843 @default.
- W2964676875 creator A5025729156 @default.
- W2964676875 creator A5040789541 @default.
- W2964676875 creator A5047929835 @default.
- W2964676875 date "2019-10-01" @default.
- W2964676875 modified "2023-09-25" @default.
- W2964676875 title "Thermal Stability and Sn Segregation of Low-Resistance Ti/p+-Ge0.95Sn0.05 Contact" @default.
- W2964676875 cites W1865086029 @default.
- W2964676875 cites W1924450830 @default.
- W2964676875 cites W1968550235 @default.
- W2964676875 cites W1969236852 @default.
- W2964676875 cites W1980797178 @default.
- W2964676875 cites W1984610893 @default.
- W2964676875 cites W1984781615 @default.
- W2964676875 cites W2038707787 @default.
- W2964676875 cites W2053437032 @default.
- W2964676875 cites W2096756299 @default.
- W2964676875 cites W2306057031 @default.
- W2964676875 cites W2342920126 @default.
- W2964676875 cites W2545386585 @default.
- W2964676875 cites W2605881792 @default.
- W2964676875 cites W2617830151 @default.
- W2964676875 cites W2768069302 @default.
- W2964676875 cites W2772794109 @default.
- W2964676875 cites W2802694339 @default.
- W2964676875 cites W2902664971 @default.
- W2964676875 cites W2911683297 @default.
- W2964676875 cites W2914091617 @default.
- W2964676875 cites W2915510287 @default.
- W2964676875 cites W2949469146 @default.
- W2964676875 cites W2949595525 @default.
- W2964676875 doi "https://doi.org/10.1109/led.2019.2933007" @default.
- W2964676875 hasPublicationYear "2019" @default.
- W2964676875 type Work @default.
- W2964676875 sameAs 2964676875 @default.
- W2964676875 citedByCount "3" @default.
- W2964676875 countsByYear W29646768752021 @default.
- W2964676875 countsByYear W29646768752022 @default.
- W2964676875 crossrefType "journal-article" @default.
- W2964676875 hasAuthorship W2964676875A5014399843 @default.
- W2964676875 hasAuthorship W2964676875A5025729156 @default.
- W2964676875 hasAuthorship W2964676875A5040789541 @default.
- W2964676875 hasAuthorship W2964676875A5047929835 @default.
- W2964676875 hasConcept C112972136 @default.
- W2964676875 hasConcept C119599485 @default.
- W2964676875 hasConcept C119857082 @default.
- W2964676875 hasConcept C121332964 @default.
- W2964676875 hasConcept C123671423 @default.
- W2964676875 hasConcept C127413603 @default.
- W2964676875 hasConcept C137693562 @default.
- W2964676875 hasConcept C159985019 @default.
- W2964676875 hasConcept C192562407 @default.
- W2964676875 hasConcept C204530211 @default.
- W2964676875 hasConcept C26873012 @default.
- W2964676875 hasConcept C2779227376 @default.
- W2964676875 hasConcept C41008148 @default.
- W2964676875 hasConcept C59061564 @default.
- W2964676875 hasConcept C61696701 @default.
- W2964676875 hasConcept C62520636 @default.
- W2964676875 hasConcept C97355855 @default.
- W2964676875 hasConceptScore W2964676875C112972136 @default.
- W2964676875 hasConceptScore W2964676875C119599485 @default.
- W2964676875 hasConceptScore W2964676875C119857082 @default.
- W2964676875 hasConceptScore W2964676875C121332964 @default.
- W2964676875 hasConceptScore W2964676875C123671423 @default.
- W2964676875 hasConceptScore W2964676875C127413603 @default.
- W2964676875 hasConceptScore W2964676875C137693562 @default.
- W2964676875 hasConceptScore W2964676875C159985019 @default.
- W2964676875 hasConceptScore W2964676875C192562407 @default.
- W2964676875 hasConceptScore W2964676875C204530211 @default.
- W2964676875 hasConceptScore W2964676875C26873012 @default.
- W2964676875 hasConceptScore W2964676875C2779227376 @default.
- W2964676875 hasConceptScore W2964676875C41008148 @default.
- W2964676875 hasConceptScore W2964676875C59061564 @default.
- W2964676875 hasConceptScore W2964676875C61696701 @default.
- W2964676875 hasConceptScore W2964676875C62520636 @default.
- W2964676875 hasConceptScore W2964676875C97355855 @default.
- W2964676875 hasIssue "10" @default.
- W2964676875 hasLocation W29646768751 @default.
- W2964676875 hasOpenAccess W2964676875 @default.
- W2964676875 hasPrimaryLocation W29646768751 @default.
- W2964676875 hasRelatedWork W1499153530 @default.
- W2964676875 hasRelatedWork W1970127444 @default.
- W2964676875 hasRelatedWork W1971668175 @default.
- W2964676875 hasRelatedWork W2004694934 @default.
- W2964676875 hasRelatedWork W2065633938 @default.
- W2964676875 hasRelatedWork W2259341571 @default.
- W2964676875 hasRelatedWork W2387412481 @default.
- W2964676875 hasRelatedWork W2613992936 @default.
- W2964676875 hasRelatedWork W4310271550 @default.
- W2964676875 hasRelatedWork W4313215138 @default.
- W2964676875 hasVolume "40" @default.
- W2964676875 isParatext "false" @default.
- W2964676875 isRetracted "false" @default.
- W2964676875 magId "2964676875" @default.
- W2964676875 workType "article" @default.