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- W2965718984 abstract "In this study, the authors investigated the applicability of fluoroether compounds such as CF3CF2CF2OCH3 (HFE-347mcc3), (CF3)2CFOCH3 (HFE-347mmy), and CF3CF2CF2OCF=CF2 (PPVE) with low lifetimes and global warming potentials for the plasma etching of SiO2 and Si3N4 layers in inductively coupled plasma. The isomeric effects of HFE-347mcc3 (with the methoxy group at the end) and HFE-347mmy (with the methoxy group at the center) were also compared. PPVE produced larger amounts of low-mass fluorocarbons (CF, CF2, CF3) than C4F8 and hence showed a higher etch rate than C4F8 for all the substrates. The HFE-347mcc3 and HFE-347mmy plasmas consisted of large amounts of H and HF. Hence, their Si3N4 etch rates were higher than that of C4F8. The etch rate of HFE-347mmy was slightly higher than that of HFE-347mcc3 for all the substrates. The density of C4F8 was slightly higher than that of fluoroethers. However, the difference was not significant under the experimental conditions used in this study. The million metric ton carbon equivalents (MMTCEs) of all the etchants were calculated from the concentration of the exhaust gases produced by them during etching. The MMTCEs of PPVE and HFE-347mcc3/HFE-347mmy were 49% and 90%, respectively, lower than that of C4F8. The fluoroether compounds used in this study demonstrated a significantly reduced global warming effect as compared to C4F8 and hence can be used as potential etchants." @default.
- W2965718984 created "2019-08-13" @default.
- W2965718984 creator A5017477007 @default.
- W2965718984 creator A5027486038 @default.
- W2965718984 creator A5036852269 @default.
- W2965718984 creator A5051152658 @default.
- W2965718984 creator A5052870495 @default.
- W2965718984 date "2019-07-30" @default.
- W2965718984 modified "2023-09-27" @default.
- W2965718984 title "Low-global warming potential fluoroether compounds for plasma etching of SiO<sub>2</sub> and Si<sub>3</sub>N<sub>4</sub> layers" @default.
- W2965718984 cites W1968590512 @default.
- W2965718984 cites W1983887852 @default.
- W2965718984 cites W2010138237 @default.
- W2965718984 cites W2017138296 @default.
- W2965718984 cites W2022736884 @default.
- W2965718984 cites W2033821184 @default.
- W2965718984 cites W2051662860 @default.
- W2965718984 cites W2070094478 @default.
- W2965718984 cites W2071272933 @default.
- W2965718984 cites W2074264028 @default.
- W2965718984 cites W2077550558 @default.
- W2965718984 cites W2083599885 @default.
- W2965718984 cites W2083674944 @default.
- W2965718984 cites W2084688914 @default.
- W2965718984 cites W2090737364 @default.
- W2965718984 cites W2092025411 @default.
- W2965718984 cites W2094427838 @default.
- W2965718984 cites W2094810462 @default.
- W2965718984 cites W2095463097 @default.
- W2965718984 cites W2759376314 @default.
- W2965718984 cites W2762859909 @default.
- W2965718984 cites W2806297944 @default.
- W2965718984 cites W2900377796 @default.
- W2965718984 cites W2901048956 @default.
- W2965718984 cites W2901513458 @default.
- W2965718984 doi "https://doi.org/10.1116/1.5100302" @default.
- W2965718984 hasPublicationYear "2019" @default.
- W2965718984 type Work @default.
- W2965718984 sameAs 2965718984 @default.
- W2965718984 citedByCount "7" @default.
- W2965718984 countsByYear W29657189842020 @default.
- W2965718984 countsByYear W29657189842021 @default.
- W2965718984 countsByYear W29657189842022 @default.
- W2965718984 countsByYear W29657189842023 @default.
- W2965718984 crossrefType "journal-article" @default.
- W2965718984 hasAuthorship W2965718984A5017477007 @default.
- W2965718984 hasAuthorship W2965718984A5027486038 @default.
- W2965718984 hasAuthorship W2965718984A5036852269 @default.
- W2965718984 hasAuthorship W2965718984A5051152658 @default.
- W2965718984 hasAuthorship W2965718984A5052870495 @default.
- W2965718984 hasConcept C100460472 @default.
- W2965718984 hasConcept C107872376 @default.
- W2965718984 hasConcept C111368507 @default.
- W2965718984 hasConcept C113196181 @default.
- W2965718984 hasConcept C119288801 @default.
- W2965718984 hasConcept C121332964 @default.
- W2965718984 hasConcept C127313418 @default.
- W2965718984 hasConcept C178790620 @default.
- W2965718984 hasConcept C185592680 @default.
- W2965718984 hasConcept C2779227376 @default.
- W2965718984 hasConcept C47737302 @default.
- W2965718984 hasConcept C62520636 @default.
- W2965718984 hasConcept C82706917 @default.
- W2965718984 hasConcept C95974651 @default.
- W2965718984 hasConceptScore W2965718984C100460472 @default.
- W2965718984 hasConceptScore W2965718984C107872376 @default.
- W2965718984 hasConceptScore W2965718984C111368507 @default.
- W2965718984 hasConceptScore W2965718984C113196181 @default.
- W2965718984 hasConceptScore W2965718984C119288801 @default.
- W2965718984 hasConceptScore W2965718984C121332964 @default.
- W2965718984 hasConceptScore W2965718984C127313418 @default.
- W2965718984 hasConceptScore W2965718984C178790620 @default.
- W2965718984 hasConceptScore W2965718984C185592680 @default.
- W2965718984 hasConceptScore W2965718984C2779227376 @default.
- W2965718984 hasConceptScore W2965718984C47737302 @default.
- W2965718984 hasConceptScore W2965718984C62520636 @default.
- W2965718984 hasConceptScore W2965718984C82706917 @default.
- W2965718984 hasConceptScore W2965718984C95974651 @default.
- W2965718984 hasFunder F4320321681 @default.
- W2965718984 hasFunder F4320322120 @default.
- W2965718984 hasFunder F4320335199 @default.
- W2965718984 hasIssue "5" @default.
- W2965718984 hasLocation W29657189841 @default.
- W2965718984 hasOpenAccess W2965718984 @default.
- W2965718984 hasPrimaryLocation W29657189841 @default.
- W2965718984 hasRelatedWork W1544774047 @default.
- W2965718984 hasRelatedWork W1986965160 @default.
- W2965718984 hasRelatedWork W1999783573 @default.
- W2965718984 hasRelatedWork W2006657395 @default.
- W2965718984 hasRelatedWork W2017222986 @default.
- W2965718984 hasRelatedWork W2059112004 @default.
- W2965718984 hasRelatedWork W2060658003 @default.
- W2965718984 hasRelatedWork W2069835101 @default.
- W2965718984 hasRelatedWork W2519248803 @default.
- W2965718984 hasRelatedWork W771314663 @default.
- W2965718984 hasVolume "37" @default.
- W2965718984 isParatext "false" @default.
- W2965718984 isRetracted "false" @default.
- W2965718984 magId "2965718984" @default.
- W2965718984 workType "article" @default.