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• W2965954155 abstract "Piezoactuators are ubiquitous in atomic force microscopes (AFM) which are usually used to scan the sample surface at the fixed frequency of a raster pattern. To improve the scanning result, a repetitive control system is implemented to compensate for the periodical errors. However, the repetitive controller (RC) unavoidably arises the resonance of the system because of the high gain at the harmonic of the tracking frequency. To damp the resonance, a positive position feedback (PPF) controller is incorporated into the feedback control system. In this article, we design an RC-PPF control system and analyze the performance compared with different control schemes. The 200 Hz square wave tracking experiments show that the rising time of the system is reduced by 61% from 172 μs to 67 μs, the root-mean-square of the error is reduced by 73% from 260 nm to 69 nm, the resonance peak is damped by about 13 dB and the settling time is reduced by 88% from 242 μs to 28 μs." @default.
• W2965954155 created "2019-08-13" @default.
• W2965954155 creator A5042750801 @default.
• W2965954155 creator A5087281996 @default.
• W2965954155 date "2019-05-01" @default.
• W2965954155 modified "2023-09-25" @default.
• W2965954155 title "Motion Control of Piezoelectric Actuator for High-Speed AFM Systems" @default.
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• W2965954155 doi "https://doi.org/10.1109/icphys.2019.8780256" @default.
• W2965954155 hasPublicationYear "2019" @default.
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