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• W2966570147 endingPage "70" @default.
• W2966570147 startingPage "29" @default.
• W2966570147 abstract "Conductive atomic force microscopy has become a valuable tool for investigation of electronic transport properties with utmost lateral resolution. In this chapter, we prevent an overview about C-AFM applications to high-k semiconductors, which are key materials for future energy-efficient information technology." @default.
• W2966570147 created "2019-08-13" @default.
• W2966570147 creator A5035034347 @default.
• W2966570147 creator A5047478335 @default.
• W2966570147 creator A5077582758 @default.
• W2966570147 date "2019-01-01" @default.
• W2966570147 modified "2023-10-05" @default.
• W2966570147 title "Conductive AFM for Nanoscale Analysis of High-k Dielectric Metal Oxides" @default.
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• W2966570147 doi "https://doi.org/10.1007/978-3-030-15612-1_2" @default.
• W2966570147 hasPublicationYear "2019" @default.
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