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- W2967111566 abstract "Extreme ultraviolet (EUV) radiation is a powerful tool for material characterization; for many years, it has been developed as a potential candidate to replace deep ultraviolet (DUV) in the photoli..." @default.
- W2967111566 created "2019-08-22" @default.
- W2967111566 creator A5029087739 @default.
- W2967111566 creator A5031808189 @default.
- W2967111566 date "2019-07-04" @default.
- W2967111566 modified "2023-09-30" @default.
- W2967111566 title "Lensless EUV Lithography and Imaging" @default.
- W2967111566 cites W1966129190 @default.
- W2967111566 cites W2030344434 @default.
- W2967111566 cites W2057726643 @default.
- W2967111566 cites W2073245411 @default.
- W2967111566 cites W2102182765 @default.
- W2967111566 cites W2233057077 @default.
- W2967111566 cites W2501698921 @default.
- W2967111566 cites W2765772341 @default.
- W2967111566 cites W2791909811 @default.
- W2967111566 cites W2894401886 @default.
- W2967111566 cites W2896809733 @default.
- W2967111566 cites W2921915302 @default.
- W2967111566 cites W2929692617 @default.
- W2967111566 cites W4233222959 @default.
- W2967111566 cites W2019739084 @default.
- W2967111566 doi "https://doi.org/10.1080/08940886.2019.1634433" @default.
- W2967111566 hasPublicationYear "2019" @default.
- W2967111566 type Work @default.
- W2967111566 sameAs 2967111566 @default.
- W2967111566 citedByCount "3" @default.
- W2967111566 countsByYear W29671115662020 @default.
- W2967111566 countsByYear W29671115662021 @default.
- W2967111566 countsByYear W29671115662022 @default.
- W2967111566 crossrefType "journal-article" @default.
- W2967111566 hasAuthorship W2967111566A5029087739 @default.
- W2967111566 hasAuthorship W2967111566A5031808189 @default.
- W2967111566 hasBestOaLocation W29671115662 @default.
- W2967111566 hasConcept C120665830 @default.
- W2967111566 hasConcept C121332964 @default.
- W2967111566 hasConcept C162996421 @default.
- W2967111566 hasConcept C192562407 @default.
- W2967111566 hasConcept C204223013 @default.
- W2967111566 hasConceptScore W2967111566C120665830 @default.
- W2967111566 hasConceptScore W2967111566C121332964 @default.
- W2967111566 hasConceptScore W2967111566C162996421 @default.
- W2967111566 hasConceptScore W2967111566C192562407 @default.
- W2967111566 hasConceptScore W2967111566C204223013 @default.
- W2967111566 hasLocation W29671115661 @default.
- W2967111566 hasLocation W29671115662 @default.
- W2967111566 hasOpenAccess W2967111566 @default.
- W2967111566 hasPrimaryLocation W29671115661 @default.
- W2967111566 hasRelatedWork W1985902695 @default.
- W2967111566 hasRelatedWork W1998885235 @default.
- W2967111566 hasRelatedWork W2002327079 @default.
- W2967111566 hasRelatedWork W2003653744 @default.
- W2967111566 hasRelatedWork W2031897122 @default.
- W2967111566 hasRelatedWork W2066718158 @default.
- W2967111566 hasRelatedWork W2084687501 @default.
- W2967111566 hasRelatedWork W2111704234 @default.
- W2967111566 hasRelatedWork W2300998316 @default.
- W2967111566 hasRelatedWork W2787558120 @default.
- W2967111566 hasRelatedWork W2794346447 @default.
- W2967111566 hasRelatedWork W2914595912 @default.
- W2967111566 hasRelatedWork W3103978859 @default.
- W2967111566 hasRelatedWork W3130048726 @default.
- W2967111566 hasRelatedWork W3139849560 @default.
- W2967111566 hasRelatedWork W3175850337 @default.
- W2967111566 hasRelatedWork W3208053907 @default.
- W2967111566 hasRelatedWork W2852512233 @default.
- W2967111566 hasRelatedWork W2852630104 @default.
- W2967111566 hasRelatedWork W2852688199 @default.
- W2967111566 isParatext "false" @default.
- W2967111566 isRetracted "false" @default.
- W2967111566 magId "2967111566" @default.
- W2967111566 workType "article" @default.