Matches in SemOpenAlex for { <https://semopenalex.org/work/W2967289310> ?p ?o ?g. }
- W2967289310 endingPage "297" @default.
- W2967289310 startingPage "289" @default.
- W2967289310 abstract "Abstract Methods for fabricating micro- and nanoscale three-dimensional (3D) structures such as electron-beam lithography (EBL) attracted attention in various fields. In EBL, an acceleration-voltage modulation method can be used to control the developing depth of the structure. In this study, we fabricated a rose petal structure using acceleration-voltage modulation. Using a rose petal mold, plastic- and silver-duplicated rose petals were prepared using nano-imprint lithography (NIL). We demonstrated that various complex 3D structures and materials can be duplicated using NIL by applying an acceleration-voltage modulation method." @default.
- W2967289310 created "2019-08-22" @default.
- W2967289310 creator A5064192882 @default.
- W2967289310 creator A5091158809 @default.
- W2967289310 date "2019-06-01" @default.
- W2967289310 modified "2023-09-25" @default.
- W2967289310 title "Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography" @default.
- W2967289310 cites W1969888076 @default.
- W2967289310 cites W1981970103 @default.
- W2967289310 cites W2002144609 @default.
- W2967289310 cites W2005485153 @default.
- W2967289310 cites W2007620231 @default.
- W2967289310 cites W2010558786 @default.
- W2967289310 cites W2014468521 @default.
- W2967289310 cites W2017759576 @default.
- W2967289310 cites W2033810970 @default.
- W2967289310 cites W2034254671 @default.
- W2967289310 cites W2039403535 @default.
- W2967289310 cites W2062074587 @default.
- W2967289310 cites W2086620837 @default.
- W2967289310 cites W2089549634 @default.
- W2967289310 cites W2148591111 @default.
- W2967289310 cites W2153010999 @default.
- W2967289310 cites W2575494827 @default.
- W2967289310 cites W4234109392 @default.
- W2967289310 doi "https://doi.org/10.1515/aot-2019-0017" @default.
- W2967289310 hasPublicationYear "2019" @default.
- W2967289310 type Work @default.
- W2967289310 sameAs 2967289310 @default.
- W2967289310 citedByCount "2" @default.
- W2967289310 countsByYear W29672893102020 @default.
- W2967289310 countsByYear W29672893102022 @default.
- W2967289310 crossrefType "journal-article" @default.
- W2967289310 hasAuthorship W2967289310A5064192882 @default.
- W2967289310 hasAuthorship W2967289310A5091158809 @default.
- W2967289310 hasConcept C117896860 @default.
- W2967289310 hasConcept C119599485 @default.
- W2967289310 hasConcept C120665830 @default.
- W2967289310 hasConcept C121332964 @default.
- W2967289310 hasConcept C122802935 @default.
- W2967289310 hasConcept C123079801 @default.
- W2967289310 hasConcept C127413603 @default.
- W2967289310 hasConcept C136525101 @default.
- W2967289310 hasConcept C137905882 @default.
- W2967289310 hasConcept C142724271 @default.
- W2967289310 hasConcept C147120987 @default.
- W2967289310 hasConcept C159985019 @default.
- W2967289310 hasConcept C162117346 @default.
- W2967289310 hasConcept C163581340 @default.
- W2967289310 hasConcept C165801399 @default.
- W2967289310 hasConcept C171250308 @default.
- W2967289310 hasConcept C192562407 @default.
- W2967289310 hasConcept C200274948 @default.
- W2967289310 hasConcept C204223013 @default.
- W2967289310 hasConcept C204787440 @default.
- W2967289310 hasConcept C24890656 @default.
- W2967289310 hasConcept C2777046567 @default.
- W2967289310 hasConcept C2779227376 @default.
- W2967289310 hasConcept C2780566776 @default.
- W2967289310 hasConcept C41794268 @default.
- W2967289310 hasConcept C49040817 @default.
- W2967289310 hasConcept C53524968 @default.
- W2967289310 hasConcept C62520636 @default.
- W2967289310 hasConcept C71924100 @default.
- W2967289310 hasConcept C74650414 @default.
- W2967289310 hasConcept C95312477 @default.
- W2967289310 hasConceptScore W2967289310C117896860 @default.
- W2967289310 hasConceptScore W2967289310C119599485 @default.
- W2967289310 hasConceptScore W2967289310C120665830 @default.
- W2967289310 hasConceptScore W2967289310C121332964 @default.
- W2967289310 hasConceptScore W2967289310C122802935 @default.
- W2967289310 hasConceptScore W2967289310C123079801 @default.
- W2967289310 hasConceptScore W2967289310C127413603 @default.
- W2967289310 hasConceptScore W2967289310C136525101 @default.
- W2967289310 hasConceptScore W2967289310C137905882 @default.
- W2967289310 hasConceptScore W2967289310C142724271 @default.
- W2967289310 hasConceptScore W2967289310C147120987 @default.
- W2967289310 hasConceptScore W2967289310C159985019 @default.
- W2967289310 hasConceptScore W2967289310C162117346 @default.
- W2967289310 hasConceptScore W2967289310C163581340 @default.
- W2967289310 hasConceptScore W2967289310C165801399 @default.
- W2967289310 hasConceptScore W2967289310C171250308 @default.
- W2967289310 hasConceptScore W2967289310C192562407 @default.
- W2967289310 hasConceptScore W2967289310C200274948 @default.
- W2967289310 hasConceptScore W2967289310C204223013 @default.
- W2967289310 hasConceptScore W2967289310C204787440 @default.
- W2967289310 hasConceptScore W2967289310C24890656 @default.
- W2967289310 hasConceptScore W2967289310C2777046567 @default.
- W2967289310 hasConceptScore W2967289310C2779227376 @default.
- W2967289310 hasConceptScore W2967289310C2780566776 @default.
- W2967289310 hasConceptScore W2967289310C41794268 @default.
- W2967289310 hasConceptScore W2967289310C49040817 @default.
- W2967289310 hasConceptScore W2967289310C53524968 @default.
- W2967289310 hasConceptScore W2967289310C62520636 @default.
- W2967289310 hasConceptScore W2967289310C71924100 @default.
- W2967289310 hasConceptScore W2967289310C74650414 @default.
- W2967289310 hasConceptScore W2967289310C95312477 @default.
- W2967289310 hasIssue "3-4" @default.