Matches in SemOpenAlex for { <https://semopenalex.org/work/W2967551455> ?p ?o ?g. }
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- W2967551455 endingPage "235" @default.
- W2967551455 startingPage "217" @default.
- W2967551455 abstract "In this book chapter it is shown that Al2O3 deposition systems based on spatial ALD with wafer floatation are attractive for passivation of cSi solar cells in high-volume manufacturing. In principle, the throughput can be increased to 7,200 wafers/h; the limitation is not the ALD track, but the unloading automation." @default.
- W2967551455 created "2019-08-22" @default.
- W2967551455 creator A5001586567 @default.
- W2967551455 creator A5089967944 @default.
- W2967551455 date "2018-12-04" @default.
- W2967551455 modified "2023-09-25" @default.
- W2967551455 title "Spatial atomic layer deposition of A12O3: Levitrack, a one-pass ALD system with throughputs exceeding 6,000 wafers/h" @default.
- W2967551455 doi "https://doi.org/10.1049/pbpo106e_ch13" @default.
- W2967551455 hasPublicationYear "2018" @default.
- W2967551455 type Work @default.
- W2967551455 sameAs 2967551455 @default.
- W2967551455 citedByCount "0" @default.
- W2967551455 crossrefType "book-chapter" @default.
- W2967551455 hasAuthorship W2967551455A5001586567 @default.
- W2967551455 hasAuthorship W2967551455A5089967944 @default.
- W2967551455 hasConcept C127313418 @default.
- W2967551455 hasConcept C151730666 @default.
- W2967551455 hasConcept C157764524 @default.
- W2967551455 hasConcept C160671074 @default.
- W2967551455 hasConcept C171250308 @default.
- W2967551455 hasConcept C192562407 @default.
- W2967551455 hasConcept C2779227376 @default.
- W2967551455 hasConcept C2816523 @default.
- W2967551455 hasConcept C33574316 @default.
- W2967551455 hasConcept C41008148 @default.
- W2967551455 hasConcept C49040817 @default.
- W2967551455 hasConcept C555944384 @default.
- W2967551455 hasConcept C64297162 @default.
- W2967551455 hasConcept C69544855 @default.
- W2967551455 hasConcept C76155785 @default.
- W2967551455 hasConceptScore W2967551455C127313418 @default.
- W2967551455 hasConceptScore W2967551455C151730666 @default.
- W2967551455 hasConceptScore W2967551455C157764524 @default.
- W2967551455 hasConceptScore W2967551455C160671074 @default.
- W2967551455 hasConceptScore W2967551455C171250308 @default.
- W2967551455 hasConceptScore W2967551455C192562407 @default.
- W2967551455 hasConceptScore W2967551455C2779227376 @default.
- W2967551455 hasConceptScore W2967551455C2816523 @default.
- W2967551455 hasConceptScore W2967551455C33574316 @default.
- W2967551455 hasConceptScore W2967551455C41008148 @default.
- W2967551455 hasConceptScore W2967551455C49040817 @default.
- W2967551455 hasConceptScore W2967551455C555944384 @default.
- W2967551455 hasConceptScore W2967551455C64297162 @default.
- W2967551455 hasConceptScore W2967551455C69544855 @default.
- W2967551455 hasConceptScore W2967551455C76155785 @default.
- W2967551455 hasLocation W29675514551 @default.
- W2967551455 hasOpenAccess W2967551455 @default.
- W2967551455 hasPrimaryLocation W29675514551 @default.
- W2967551455 hasRelatedWork W1495898976 @default.
- W2967551455 hasRelatedWork W2065034390 @default.
- W2967551455 hasRelatedWork W2070687134 @default.
- W2967551455 hasRelatedWork W2092031154 @default.
- W2967551455 hasRelatedWork W2152488357 @default.
- W2967551455 hasRelatedWork W2162270427 @default.
- W2967551455 hasRelatedWork W2258246440 @default.
- W2967551455 hasRelatedWork W2338759360 @default.
- W2967551455 hasRelatedWork W2345852075 @default.
- W2967551455 hasRelatedWork W2496305981 @default.
- W2967551455 hasRelatedWork W2531657078 @default.
- W2967551455 hasRelatedWork W2602428918 @default.
- W2967551455 hasRelatedWork W2903311684 @default.
- W2967551455 hasRelatedWork W2984641762 @default.
- W2967551455 hasRelatedWork W3010876315 @default.
- W2967551455 hasRelatedWork W3204001933 @default.
- W2967551455 hasRelatedWork W46615798 @default.
- W2967551455 hasRelatedWork W624558298 @default.
- W2967551455 hasRelatedWork W94374032 @default.
- W2967551455 hasRelatedWork W2096965501 @default.
- W2967551455 isParatext "false" @default.
- W2967551455 isRetracted "false" @default.
- W2967551455 magId "2967551455" @default.
- W2967551455 workType "book-chapter" @default.