Matches in SemOpenAlex for { <https://semopenalex.org/work/W2968197315> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2968197315 abstract "Probing is increasingly utilized as a technique for the characterization of the local electrical properties of an integrated circuit, as well as the isolation of defects. Test structures and/or SRAM arrays were examined with the various probing modes available with a probing system. Test structures were examined using Electron Beam Absorbed Current (EBAC), Resistive Contrast Imaging (RCI), Electron Beam Induced Current, (EBIC), and EBIRCH (Electron Beam Induced Resistance CHange). The results demonstrate the utility of using each in an SRAM yield management scenario. EBAC is able to provide information about basic connectivity. RCI allows for the isolation of resistive spots along a conductor. EBIC provides for the imaging of depletion zones between PW and NW, even in a planar view. EBIRCH, being driven by two different mechanisms (thermal coefficient of resistivity and Seebeck effect) is able to provide two different kinds of analyses, depending on the conditions. EBIRCH precisely isolated which of a few fins in a multi-fin device are responsible for a short and showed the thermal relations between the elements of a pulldown device in an SRAM. The techniques together provide multiple forms of process feedback when used as part of an integrated yield management program involving analysis of via chains, SRAM parallel array test structures, and SRAMs." @default.
- W2968197315 created "2019-08-22" @default.
- W2968197315 creator A5019818497 @default.
- W2968197315 creator A5023909316 @default.
- W2968197315 creator A5038673526 @default.
- W2968197315 creator A5056172216 @default.
- W2968197315 creator A5078685001 @default.
- W2968197315 date "2019-05-01" @default.
- W2968197315 modified "2023-09-27" @default.
- W2968197315 title "Distinguishing between electron-beam signals in probing of SRAM modules for yield management" @default.
- W2968197315 cites W2761426860 @default.
- W2968197315 cites W2764223105 @default.
- W2968197315 doi "https://doi.org/10.1109/asmc.2019.8791824" @default.
- W2968197315 hasPublicationYear "2019" @default.
- W2968197315 type Work @default.
- W2968197315 sameAs 2968197315 @default.
- W2968197315 citedByCount "1" @default.
- W2968197315 countsByYear W29681973152023 @default.
- W2968197315 crossrefType "proceedings-article" @default.
- W2968197315 hasAuthorship W2968197315A5019818497 @default.
- W2968197315 hasAuthorship W2968197315A5023909316 @default.
- W2968197315 hasAuthorship W2968197315A5038673526 @default.
- W2968197315 hasAuthorship W2968197315A5056172216 @default.
- W2968197315 hasAuthorship W2968197315A5078685001 @default.
- W2968197315 hasConcept C119599485 @default.
- W2968197315 hasConcept C120665830 @default.
- W2968197315 hasConcept C121332964 @default.
- W2968197315 hasConcept C127413603 @default.
- W2968197315 hasConcept C134121241 @default.
- W2968197315 hasConcept C147120987 @default.
- W2968197315 hasConcept C168834538 @default.
- W2968197315 hasConcept C191897082 @default.
- W2968197315 hasConcept C192562407 @default.
- W2968197315 hasConcept C24326235 @default.
- W2968197315 hasConcept C2779162123 @default.
- W2968197315 hasConcept C49040817 @default.
- W2968197315 hasConcept C544956773 @default.
- W2968197315 hasConcept C62520636 @default.
- W2968197315 hasConcept C68043766 @default.
- W2968197315 hasConcept C6899612 @default.
- W2968197315 hasConcept C95312477 @default.
- W2968197315 hasConceptScore W2968197315C119599485 @default.
- W2968197315 hasConceptScore W2968197315C120665830 @default.
- W2968197315 hasConceptScore W2968197315C121332964 @default.
- W2968197315 hasConceptScore W2968197315C127413603 @default.
- W2968197315 hasConceptScore W2968197315C134121241 @default.
- W2968197315 hasConceptScore W2968197315C147120987 @default.
- W2968197315 hasConceptScore W2968197315C168834538 @default.
- W2968197315 hasConceptScore W2968197315C191897082 @default.
- W2968197315 hasConceptScore W2968197315C192562407 @default.
- W2968197315 hasConceptScore W2968197315C24326235 @default.
- W2968197315 hasConceptScore W2968197315C2779162123 @default.
- W2968197315 hasConceptScore W2968197315C49040817 @default.
- W2968197315 hasConceptScore W2968197315C544956773 @default.
- W2968197315 hasConceptScore W2968197315C62520636 @default.
- W2968197315 hasConceptScore W2968197315C68043766 @default.
- W2968197315 hasConceptScore W2968197315C6899612 @default.
- W2968197315 hasConceptScore W2968197315C95312477 @default.
- W2968197315 hasLocation W29681973151 @default.
- W2968197315 hasOpenAccess W2968197315 @default.
- W2968197315 hasPrimaryLocation W29681973151 @default.
- W2968197315 hasRelatedWork W2014578450 @default.
- W2968197315 hasRelatedWork W2015778192 @default.
- W2968197315 hasRelatedWork W2030076590 @default.
- W2968197315 hasRelatedWork W2048317111 @default.
- W2968197315 hasRelatedWork W2059477207 @default.
- W2968197315 hasRelatedWork W2080439023 @default.
- W2968197315 hasRelatedWork W2114846210 @default.
- W2968197315 hasRelatedWork W2410746608 @default.
- W2968197315 hasRelatedWork W2810584733 @default.
- W2968197315 hasRelatedWork W2171998237 @default.
- W2968197315 isParatext "false" @default.
- W2968197315 isRetracted "false" @default.
- W2968197315 magId "2968197315" @default.
- W2968197315 workType "article" @default.