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- W2968477568 abstract "For inline defect inspection it is important to achieve a high capture rate of defects of interest (DOI) at low nuisance rate to increase production efficiency. A broadband plasma (BBP) wafer defect inspection system with Inline Defect Organizer™ (iDO) can separate DOI and nuisance defects into different bins.However, high expertise is required to set up an effective iDO™ classifier. Traditional iDO setup complexity increases as design rules shrink. A novel approach is developed by adopting machine learning algorithms and SEM-classified defect data to create a new iDO classifier (a.k.a. iDO 2.0). The results are promising, showing that iDO 2.0 classifier outperforms the iDO in sensitivity, nuisance rate, ease of use, time to results and cross- device portability." @default.
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- W2968477568 date "2019-05-01" @default.
- W2968477568 modified "2023-09-24" @default.
- W2968477568 title "Inline Inspection Improvement using Machine Learning on Broadband Plasma Inspector in an Advanced Foundry Fab" @default.
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- W2968477568 doi "https://doi.org/10.1109/asmc.2019.8791796" @default.
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