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- W2969276916 abstract "Inside a vacuum chamber, we froze hexamethyldisiloxane vapors into thin-films of ice. We then patterned and crossed-linked the ice-film into silicon containing polymers by electron beam exposure. The unreacted hexamethyldisiloxane is vaporized at room temperature, and the cross-linked siloxane remains as a stable thin-film on the supporting silicon substrate. The chemical composition of the cross-linked siloxane is similar to polydimethylsiloxane (PDMS) elastomer, which is used in many transducers and sensors applications." @default.
- W2969276916 created "2019-08-29" @default.
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- W2969276916 date "2019-06-01" @default.
- W2969276916 modified "2023-09-27" @default.
- W2969276916 title "Towards Nanoscale 3d Printing of Pdms-Like Polymers" @default.
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- W2969276916 doi "https://doi.org/10.1109/transducers.2019.8808628" @default.
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