Matches in SemOpenAlex for { <https://semopenalex.org/work/W2969296096> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2969296096 abstract "This study presents a CMOS-MEMS tactile sensor fill-in with dielectric PDMS nanocomposite to batch fabricate and modulate the sensing range and sensitivity (Fig. 1). Merits of the sensor are: (1) Inprocess batch selective modulation by input voltage: apply different voltages on uncured dielectric PDMS nanocomposite fill-in simultaneously, tactile sensors with different sensing ranges and sensitivities are batch fabricated after polymer curing (Fig. 2); (2) In-use selective modulation by input voltage: the sensing range and sensitivity of each tactile sensor can still be modulated after the process by applying voltage on cured dielectric PDMS nanocomposite (Fig. 3). Moreover, sensing range and sensitivity can be further modulated using different dielectric PDMS nanocomposites. The tactile sensor is implemented using TSMC 0.18μm 1P6M CMOS process, in-house post-CMOS releasing and dielectric PDMS nanocomposite filling processes. Measurement results demonstrate the in-process modulation could modulate sensing range (60mN to 100mN) and sensitivity (maximum 2-fold enhancement) Moreover, the in-use modulation could further modulate sensitivity from 1.1fF/mN to 4.8fF/mN and sensing range from 100mN to 35mN." @default.
- W2969296096 created "2019-08-29" @default.
- W2969296096 creator A5020402378 @default.
- W2969296096 creator A5020775577 @default.
- W2969296096 creator A5025775472 @default.
- W2969296096 creator A5089184660 @default.
- W2969296096 date "2019-06-01" @default.
- W2969296096 modified "2023-10-01" @default.
- W2969296096 title "In-Process And In-Use Modulation Of Sensitivity And Sensing Range For CMOS-MEMS Tactile Sensor With Dielectric PDMS Nanocomposite" @default.
- W2969296096 cites W1580764866 @default.
- W2969296096 cites W1992513293 @default.
- W2969296096 cites W2039843843 @default.
- W2969296096 cites W2066301147 @default.
- W2969296096 cites W2116500100 @default.
- W2969296096 cites W2124236326 @default.
- W2969296096 cites W2124667750 @default.
- W2969296096 doi "https://doi.org/10.1109/transducers.2019.8808608" @default.
- W2969296096 hasPublicationYear "2019" @default.
- W2969296096 type Work @default.
- W2969296096 sameAs 2969296096 @default.
- W2969296096 citedByCount "3" @default.
- W2969296096 countsByYear W29692960962021 @default.
- W2969296096 countsByYear W29692960962023 @default.
- W2969296096 crossrefType "proceedings-article" @default.
- W2969296096 hasAuthorship W2969296096A5020402378 @default.
- W2969296096 hasAuthorship W2969296096A5020775577 @default.
- W2969296096 hasAuthorship W2969296096A5025775472 @default.
- W2969296096 hasAuthorship W2969296096A5089184660 @default.
- W2969296096 hasConcept C119599485 @default.
- W2969296096 hasConcept C121332964 @default.
- W2969296096 hasConcept C123079801 @default.
- W2969296096 hasConcept C127413603 @default.
- W2969296096 hasConcept C133386390 @default.
- W2969296096 hasConcept C154945302 @default.
- W2969296096 hasConcept C165801399 @default.
- W2969296096 hasConcept C171250308 @default.
- W2969296096 hasConcept C192562407 @default.
- W2969296096 hasConcept C21200559 @default.
- W2969296096 hasConcept C24326235 @default.
- W2969296096 hasConcept C24890656 @default.
- W2969296096 hasConcept C37977207 @default.
- W2969296096 hasConcept C41008148 @default.
- W2969296096 hasConcept C46362747 @default.
- W2969296096 hasConcept C46722567 @default.
- W2969296096 hasConcept C49040817 @default.
- W2969296096 hasConcept C90509273 @default.
- W2969296096 hasConcept C92880739 @default.
- W2969296096 hasConceptScore W2969296096C119599485 @default.
- W2969296096 hasConceptScore W2969296096C121332964 @default.
- W2969296096 hasConceptScore W2969296096C123079801 @default.
- W2969296096 hasConceptScore W2969296096C127413603 @default.
- W2969296096 hasConceptScore W2969296096C133386390 @default.
- W2969296096 hasConceptScore W2969296096C154945302 @default.
- W2969296096 hasConceptScore W2969296096C165801399 @default.
- W2969296096 hasConceptScore W2969296096C171250308 @default.
- W2969296096 hasConceptScore W2969296096C192562407 @default.
- W2969296096 hasConceptScore W2969296096C21200559 @default.
- W2969296096 hasConceptScore W2969296096C24326235 @default.
- W2969296096 hasConceptScore W2969296096C24890656 @default.
- W2969296096 hasConceptScore W2969296096C37977207 @default.
- W2969296096 hasConceptScore W2969296096C41008148 @default.
- W2969296096 hasConceptScore W2969296096C46362747 @default.
- W2969296096 hasConceptScore W2969296096C46722567 @default.
- W2969296096 hasConceptScore W2969296096C49040817 @default.
- W2969296096 hasConceptScore W2969296096C90509273 @default.
- W2969296096 hasConceptScore W2969296096C92880739 @default.
- W2969296096 hasLocation W29692960961 @default.
- W2969296096 hasOpenAccess W2969296096 @default.
- W2969296096 hasPrimaryLocation W29692960961 @default.
- W2969296096 hasRelatedWork W1517808327 @default.
- W2969296096 hasRelatedWork W1580764866 @default.
- W2969296096 hasRelatedWork W1773206252 @default.
- W2969296096 hasRelatedWork W1976473196 @default.
- W2969296096 hasRelatedWork W2032001601 @default.
- W2969296096 hasRelatedWork W2040296783 @default.
- W2969296096 hasRelatedWork W2063718811 @default.
- W2969296096 hasRelatedWork W2096698461 @default.
- W2969296096 hasRelatedWork W2119914298 @default.
- W2969296096 hasRelatedWork W2128515257 @default.
- W2969296096 hasRelatedWork W2162211431 @default.
- W2969296096 hasRelatedWork W2163781607 @default.
- W2969296096 hasRelatedWork W2166721839 @default.
- W2969296096 hasRelatedWork W2344019782 @default.
- W2969296096 hasRelatedWork W2536782312 @default.
- W2969296096 hasRelatedWork W2946035285 @default.
- W2969296096 hasRelatedWork W2980268444 @default.
- W2969296096 hasRelatedWork W3015574738 @default.
- W2969296096 hasRelatedWork W3170737698 @default.
- W2969296096 hasRelatedWork W3187502726 @default.
- W2969296096 isParatext "false" @default.
- W2969296096 isRetracted "false" @default.
- W2969296096 magId "2969296096" @default.
- W2969296096 workType "article" @default.