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- W2969387320 abstract "We report on the first imaging and visualization of the multimode resonant behaviors of aluminum nitride (AlN) piezoelectric nanomembrane resonators, by exploiting a spectromicroscopy technique based on scanning laser interferometry. High-frequency multimode vibrations (up to 33MHz) with quality (Q) factors up to ~8500 are observed in the AlN nanomembranes. Both undriven thermomechanical and coherently excited vibrations of the devices are measured and spatially mapped. Such a multimode AlN device platform with abundant resonant modes, two-dimensional (2D) large capturing surfaces, and efficient all-electrical signal transduction, holds strong promise for enabling ultrasensitive gravimetric detection, mass spectroscopy, and inertial imaging." @default.
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- W2969387320 date "2019-06-01" @default.
- W2969387320 modified "2023-09-26" @default.
- W2969387320 title "Imaging Multimode Vibrations in High-Frequency Aluminum Nitride Piezoelectric Nanomembrane Resonators" @default.
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- W2969387320 doi "https://doi.org/10.1109/transducers.2019.8808643" @default.
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