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- W2969521359 abstract "This paper reports on the realization and characterization of a fully transparent Pb(Zr0.52,Ti0.48)O3 (PZT) based MIM capacitor on glass substrate for piezoelectric transducer applications. A PZT film grown on a 200 mm Si substrate was layer transferred to a glass substrate using a new technological process. The transferred PZT film keeps its high (100) texturation obtained during deposition, which is required for optimal piezoelectric properties. ITO/PZT/ITO capacitors show excellent ferroelectric properties, thus proving piezoelectric behavior. This first demonstration opens the way to the integration of transparent piezoelectric actuators on glass for haptic devices." @default.
- W2969521359 created "2019-08-29" @default.
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- W2969521359 date "2019-06-01" @default.
- W2969521359 modified "2023-10-18" @default.
- W2969521359 title "Transparent PZT MIM Capacitors on Glass for Piezoelectric Transducer Applications" @default.
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- W2969521359 doi "https://doi.org/10.1109/transducers.2019.8808241" @default.
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