Matches in SemOpenAlex for { <https://semopenalex.org/work/W2969599015> ?p ?o ?g. }
- W2969599015 abstract "In this study, we have developed a new type of highly sensitive pressure sensor based on a microelectro mechanical system (MEMS) aluminum nitride (AlN) contour-mode resonator (CMR), which is experimentally verified by measuring pressure changes within the range of 0 kPa to 200 kPa. The CMR-based pressure sensor, offering enhanced linearity, achieves an improved sensitivity of 16.51 Hz/hPa, making it suitable for performing quantitative in-line monitoring of gaseous species production reactions, e.g. in real time detection of a hydrogen peroxide decomposition reaction." @default.
- W2969599015 created "2019-08-29" @default.
- W2969599015 creator A5025054245 @default.
- W2969599015 creator A5045315604 @default.
- W2969599015 creator A5066907634 @default.
- W2969599015 creator A5068080851 @default.
- W2969599015 creator A5075932959 @default.
- W2969599015 creator A5079731588 @default.
- W2969599015 date "2019-06-01" @default.
- W2969599015 modified "2023-09-27" @default.
- W2969599015 title "Highly Sensitive AlN Contour-Mode Resonator-Based Pressure Sensor for In-Line Monitoring of Chemical Reactions" @default.
- W2969599015 cites W1491464745 @default.
- W2969599015 cites W1594838359 @default.
- W2969599015 cites W1974025653 @default.
- W2969599015 cites W2023730126 @default.
- W2969599015 cites W2058192502 @default.
- W2969599015 cites W2068126757 @default.
- W2969599015 cites W2073767682 @default.
- W2969599015 cites W2090753813 @default.
- W2969599015 cites W2095139460 @default.
- W2969599015 cites W2296773437 @default.
- W2969599015 cites W2410673730 @default.
- W2969599015 cites W2587260882 @default.
- W2969599015 cites W2787680782 @default.
- W2969599015 doi "https://doi.org/10.1109/transducers.2019.8808326" @default.
- W2969599015 hasPublicationYear "2019" @default.
- W2969599015 type Work @default.
- W2969599015 sameAs 2969599015 @default.
- W2969599015 citedByCount "1" @default.
- W2969599015 countsByYear W29695990152023 @default.
- W2969599015 crossrefType "proceedings-article" @default.
- W2969599015 hasAuthorship W2969599015A5025054245 @default.
- W2969599015 hasAuthorship W2969599015A5045315604 @default.
- W2969599015 hasAuthorship W2969599015A5066907634 @default.
- W2969599015 hasAuthorship W2969599015A5068080851 @default.
- W2969599015 hasAuthorship W2969599015A5075932959 @default.
- W2969599015 hasAuthorship W2969599015A5079731588 @default.
- W2969599015 hasConcept C121332964 @default.
- W2969599015 hasConcept C127413603 @default.
- W2969599015 hasConcept C159985019 @default.
- W2969599015 hasConcept C171250308 @default.
- W2969599015 hasConcept C178790620 @default.
- W2969599015 hasConcept C185592680 @default.
- W2969599015 hasConcept C192562407 @default.
- W2969599015 hasConcept C194760766 @default.
- W2969599015 hasConcept C198352243 @default.
- W2969599015 hasConcept C21200559 @default.
- W2969599015 hasConcept C24326235 @default.
- W2969599015 hasConcept C2524010 @default.
- W2969599015 hasConcept C2779227376 @default.
- W2969599015 hasConcept C33923547 @default.
- W2969599015 hasConcept C37977207 @default.
- W2969599015 hasConcept C41325743 @default.
- W2969599015 hasConcept C49040817 @default.
- W2969599015 hasConcept C513153333 @default.
- W2969599015 hasConcept C533411734 @default.
- W2969599015 hasConcept C77170095 @default.
- W2969599015 hasConcept C78519656 @default.
- W2969599015 hasConcept C80264047 @default.
- W2969599015 hasConcept C97126364 @default.
- W2969599015 hasConcept C97355855 @default.
- W2969599015 hasConceptScore W2969599015C121332964 @default.
- W2969599015 hasConceptScore W2969599015C127413603 @default.
- W2969599015 hasConceptScore W2969599015C159985019 @default.
- W2969599015 hasConceptScore W2969599015C171250308 @default.
- W2969599015 hasConceptScore W2969599015C178790620 @default.
- W2969599015 hasConceptScore W2969599015C185592680 @default.
- W2969599015 hasConceptScore W2969599015C192562407 @default.
- W2969599015 hasConceptScore W2969599015C194760766 @default.
- W2969599015 hasConceptScore W2969599015C198352243 @default.
- W2969599015 hasConceptScore W2969599015C21200559 @default.
- W2969599015 hasConceptScore W2969599015C24326235 @default.
- W2969599015 hasConceptScore W2969599015C2524010 @default.
- W2969599015 hasConceptScore W2969599015C2779227376 @default.
- W2969599015 hasConceptScore W2969599015C33923547 @default.
- W2969599015 hasConceptScore W2969599015C37977207 @default.
- W2969599015 hasConceptScore W2969599015C41325743 @default.
- W2969599015 hasConceptScore W2969599015C49040817 @default.
- W2969599015 hasConceptScore W2969599015C513153333 @default.
- W2969599015 hasConceptScore W2969599015C533411734 @default.
- W2969599015 hasConceptScore W2969599015C77170095 @default.
- W2969599015 hasConceptScore W2969599015C78519656 @default.
- W2969599015 hasConceptScore W2969599015C80264047 @default.
- W2969599015 hasConceptScore W2969599015C97126364 @default.
- W2969599015 hasConceptScore W2969599015C97355855 @default.
- W2969599015 hasLocation W29695990151 @default.
- W2969599015 hasOpenAccess W2969599015 @default.
- W2969599015 hasPrimaryLocation W29695990151 @default.
- W2969599015 hasRelatedWork W1973302313 @default.
- W2969599015 hasRelatedWork W2065168345 @default.
- W2969599015 hasRelatedWork W2135243415 @default.
- W2969599015 hasRelatedWork W2151350320 @default.
- W2969599015 hasRelatedWork W2376851935 @default.
- W2969599015 hasRelatedWork W2553852550 @default.
- W2969599015 hasRelatedWork W2761655050 @default.
- W2969599015 hasRelatedWork W2990722913 @default.
- W2969599015 hasRelatedWork W3186959087 @default.
- W2969599015 hasRelatedWork W4367847346 @default.
- W2969599015 isParatext "false" @default.
- W2969599015 isRetracted "false" @default.