Matches in SemOpenAlex for { <https://semopenalex.org/work/W2969632642> ?p ?o ?g. }
- W2969632642 endingPage "1229" @default.
- W2969632642 startingPage "1229" @default.
- W2969632642 abstract "AbstractThe plasma-chemical deposition of diamond-like carbon (DLC) films onto heavily boron-doped single-crystal p -type diamond (the concentration ~10^20 cm^–3) in CH_4 + Ar plasma is conducted. The deposition rate is 7 nm min^–1. The elemental composition and properties of the films are studied in detail. It is found that the films are enriched with hydrogen, possess a density of 2.4 g cm^–3, and exhibit an ultrasmooth surface (with a roughness of 0.4 ± 0.2 nm)." @default.
- W2969632642 created "2019-08-29" @default.
- W2969632642 creator A5000672871 @default.
- W2969632642 creator A5042095922 @default.
- W2969632642 creator A5049349674 @default.
- W2969632642 creator A5055837649 @default.
- W2969632642 creator A5056905528 @default.
- W2969632642 creator A5063464050 @default.
- W2969632642 creator A5076480621 @default.
- W2969632642 creator A5078807142 @default.
- W2969632642 creator A5079732608 @default.
- W2969632642 date "2019-01-01" @default.
- W2969632642 modified "2023-09-25" @default.
- W2969632642 title "Плазмохимическое осаждение алмазоподобных пленок на поверхности монокристаллического высоколегированного алмаза" @default.
- W2969632642 doi "https://doi.org/10.21883/ftp.2019.09.48129.12" @default.
- W2969632642 hasPublicationYear "2019" @default.
- W2969632642 type Work @default.
- W2969632642 sameAs 2969632642 @default.
- W2969632642 citedByCount "0" @default.
- W2969632642 crossrefType "journal-article" @default.
- W2969632642 hasAuthorship W2969632642A5000672871 @default.
- W2969632642 hasAuthorship W2969632642A5042095922 @default.
- W2969632642 hasAuthorship W2969632642A5049349674 @default.
- W2969632642 hasAuthorship W2969632642A5055837649 @default.
- W2969632642 hasAuthorship W2969632642A5056905528 @default.
- W2969632642 hasAuthorship W2969632642A5063464050 @default.
- W2969632642 hasAuthorship W2969632642A5076480621 @default.
- W2969632642 hasAuthorship W2969632642A5078807142 @default.
- W2969632642 hasAuthorship W2969632642A5079732608 @default.
- W2969632642 hasBestOaLocation W29696326421 @default.
- W2969632642 hasConcept C104779481 @default.
- W2969632642 hasConcept C107365816 @default.
- W2969632642 hasConcept C107872376 @default.
- W2969632642 hasConcept C113196181 @default.
- W2969632642 hasConcept C121332964 @default.
- W2969632642 hasConcept C123380192 @default.
- W2969632642 hasConcept C127313418 @default.
- W2969632642 hasConcept C127413603 @default.
- W2969632642 hasConcept C140205800 @default.
- W2969632642 hasConcept C151730666 @default.
- W2969632642 hasConcept C159985019 @default.
- W2969632642 hasConcept C171250308 @default.
- W2969632642 hasConcept C178790620 @default.
- W2969632642 hasConcept C185592680 @default.
- W2969632642 hasConcept C19067145 @default.
- W2969632642 hasConcept C191897082 @default.
- W2969632642 hasConcept C192562407 @default.
- W2969632642 hasConcept C199360897 @default.
- W2969632642 hasConcept C2776921476 @default.
- W2969632642 hasConcept C2781285689 @default.
- W2969632642 hasConcept C2816523 @default.
- W2969632642 hasConcept C41008148 @default.
- W2969632642 hasConcept C42360764 @default.
- W2969632642 hasConcept C501308230 @default.
- W2969632642 hasConcept C512968161 @default.
- W2969632642 hasConcept C57410435 @default.
- W2969632642 hasConcept C62520636 @default.
- W2969632642 hasConcept C64297162 @default.
- W2969632642 hasConcept C71039073 @default.
- W2969632642 hasConcept C75937256 @default.
- W2969632642 hasConcept C82706917 @default.
- W2969632642 hasConceptScore W2969632642C104779481 @default.
- W2969632642 hasConceptScore W2969632642C107365816 @default.
- W2969632642 hasConceptScore W2969632642C107872376 @default.
- W2969632642 hasConceptScore W2969632642C113196181 @default.
- W2969632642 hasConceptScore W2969632642C121332964 @default.
- W2969632642 hasConceptScore W2969632642C123380192 @default.
- W2969632642 hasConceptScore W2969632642C127313418 @default.
- W2969632642 hasConceptScore W2969632642C127413603 @default.
- W2969632642 hasConceptScore W2969632642C140205800 @default.
- W2969632642 hasConceptScore W2969632642C151730666 @default.
- W2969632642 hasConceptScore W2969632642C159985019 @default.
- W2969632642 hasConceptScore W2969632642C171250308 @default.
- W2969632642 hasConceptScore W2969632642C178790620 @default.
- W2969632642 hasConceptScore W2969632642C185592680 @default.
- W2969632642 hasConceptScore W2969632642C19067145 @default.
- W2969632642 hasConceptScore W2969632642C191897082 @default.
- W2969632642 hasConceptScore W2969632642C192562407 @default.
- W2969632642 hasConceptScore W2969632642C199360897 @default.
- W2969632642 hasConceptScore W2969632642C2776921476 @default.
- W2969632642 hasConceptScore W2969632642C2781285689 @default.
- W2969632642 hasConceptScore W2969632642C2816523 @default.
- W2969632642 hasConceptScore W2969632642C41008148 @default.
- W2969632642 hasConceptScore W2969632642C42360764 @default.
- W2969632642 hasConceptScore W2969632642C501308230 @default.
- W2969632642 hasConceptScore W2969632642C512968161 @default.
- W2969632642 hasConceptScore W2969632642C57410435 @default.
- W2969632642 hasConceptScore W2969632642C62520636 @default.
- W2969632642 hasConceptScore W2969632642C64297162 @default.
- W2969632642 hasConceptScore W2969632642C71039073 @default.
- W2969632642 hasConceptScore W2969632642C75937256 @default.
- W2969632642 hasConceptScore W2969632642C82706917 @default.
- W2969632642 hasIssue "9" @default.
- W2969632642 hasLocation W29696326421 @default.
- W2969632642 hasOpenAccess W2969632642 @default.
- W2969632642 hasPrimaryLocation W29696326421 @default.
- W2969632642 hasRelatedWork W2023476050 @default.
- W2969632642 hasRelatedWork W2069494439 @default.