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- W2969721388 abstract "Acoustoelectric (AE) effects have long been a subject of investigation for applications in acoustic wave amplifiers and signal processors. Recent developments in wafer-bonding techniques are leveraged to demonstrate heterogeneous integration of semiconductor and piezoelectric materials required in these devices. This work demonstrates amplification of surface acoustic waves in 128° Y-cut lithium niobate with thin film silicon as a semiconductor. A room temperature bonding process that utilizes Al <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> as an intermediate layer has been developed and applied to the fabrication of AE delay lines. Peak non-reciprocal contrasts of 11.2 dB/mm (normalized) and 9.8 dB (absolute) between forward and reverse traveling waves under the influence of applied dc bias are demonstrated at 460 MHz." @default.
- W2969721388 created "2019-08-29" @default.
- W2969721388 creator A5082724108 @default.
- W2969721388 date "2019-06-01" @default.
- W2969721388 modified "2023-10-03" @default.
- W2969721388 title "FDSOI on Lithium Niobate Using Al<sub>2</sub>O<sub>3</sub> Wafer-Bonding for Acoustoelectric RF Microdevices" @default.
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- W2969721388 doi "https://doi.org/10.1109/transducers.2019.8808600" @default.
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