Matches in SemOpenAlex for { <https://semopenalex.org/work/W2969871719> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2969871719 abstract "Based on the discovery of ferroelectric polarization inversion in piezoelectric Al <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1.x</sub> Sc <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> N thin films, this paper presents a double layer actuator stack configuration which demonstrates that the inherent advantages of piezoelectric AlN and Al <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1-x</sub> Sc <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> N, like CMOS compatibility, polarization stability and linearity can be combined with the advantages of classical ferroelectric multilayer systems to achieve superior strain output for piezoelectric MEMS actuators with minimal effort compared to alternative multilayer approaches." @default.
- W2969871719 created "2019-08-29" @default.
- W2969871719 creator A5017673537 @default.
- W2969871719 creator A5048913578 @default.
- W2969871719 creator A5065975441 @default.
- W2969871719 creator A5072436527 @default.
- W2969871719 date "2019-06-01" @default.
- W2969871719 modified "2023-10-17" @default.
- W2969871719 title "A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al<sub>1-X</sub> Sc<sub>x</sub>N" @default.
- W2969871719 cites W1975033820 @default.
- W2969871719 cites W1976174178 @default.
- W2969871719 cites W1993717184 @default.
- W2969871719 cites W2101739496 @default.
- W2969871719 cites W2736977214 @default.
- W2969871719 cites W2769324814 @default.
- W2969871719 cites W2896704624 @default.
- W2969871719 cites W410782996 @default.
- W2969871719 doi "https://doi.org/10.1109/transducers.2019.8808624" @default.
- W2969871719 hasPublicationYear "2019" @default.
- W2969871719 type Work @default.
- W2969871719 sameAs 2969871719 @default.
- W2969871719 citedByCount "5" @default.
- W2969871719 countsByYear W29698717192020 @default.
- W2969871719 countsByYear W29698717192021 @default.
- W2969871719 crossrefType "proceedings-article" @default.
- W2969871719 hasAuthorship W2969871719A5017673537 @default.
- W2969871719 hasAuthorship W2969871719A5048913578 @default.
- W2969871719 hasAuthorship W2969871719A5065975441 @default.
- W2969871719 hasAuthorship W2969871719A5072436527 @default.
- W2969871719 hasConcept C100082104 @default.
- W2969871719 hasConcept C11413529 @default.
- W2969871719 hasConcept C119599485 @default.
- W2969871719 hasConcept C127413603 @default.
- W2969871719 hasConcept C133386390 @default.
- W2969871719 hasConcept C147789679 @default.
- W2969871719 hasConcept C154945302 @default.
- W2969871719 hasConcept C159985019 @default.
- W2969871719 hasConcept C172707124 @default.
- W2969871719 hasConcept C185592680 @default.
- W2969871719 hasConcept C192562407 @default.
- W2969871719 hasConcept C205049153 @default.
- W2969871719 hasConcept C41008148 @default.
- W2969871719 hasConcept C49040817 @default.
- W2969871719 hasConcept C77170095 @default.
- W2969871719 hasConcept C79090758 @default.
- W2969871719 hasConceptScore W2969871719C100082104 @default.
- W2969871719 hasConceptScore W2969871719C11413529 @default.
- W2969871719 hasConceptScore W2969871719C119599485 @default.
- W2969871719 hasConceptScore W2969871719C127413603 @default.
- W2969871719 hasConceptScore W2969871719C133386390 @default.
- W2969871719 hasConceptScore W2969871719C147789679 @default.
- W2969871719 hasConceptScore W2969871719C154945302 @default.
- W2969871719 hasConceptScore W2969871719C159985019 @default.
- W2969871719 hasConceptScore W2969871719C172707124 @default.
- W2969871719 hasConceptScore W2969871719C185592680 @default.
- W2969871719 hasConceptScore W2969871719C192562407 @default.
- W2969871719 hasConceptScore W2969871719C205049153 @default.
- W2969871719 hasConceptScore W2969871719C41008148 @default.
- W2969871719 hasConceptScore W2969871719C49040817 @default.
- W2969871719 hasConceptScore W2969871719C77170095 @default.
- W2969871719 hasConceptScore W2969871719C79090758 @default.
- W2969871719 hasLocation W29698717191 @default.
- W2969871719 hasOpenAccess W2969871719 @default.
- W2969871719 hasPrimaryLocation W29698717191 @default.
- W2969871719 hasRelatedWork W120386264 @default.
- W2969871719 hasRelatedWork W1996780177 @default.
- W2969871719 hasRelatedWork W2011074861 @default.
- W2969871719 hasRelatedWork W2023858428 @default.
- W2969871719 hasRelatedWork W2166883442 @default.
- W2969871719 hasRelatedWork W2248971758 @default.
- W2969871719 hasRelatedWork W2369514825 @default.
- W2969871719 hasRelatedWork W2910697626 @default.
- W2969871719 hasRelatedWork W4309764133 @default.
- W2969871719 hasRelatedWork W4327948915 @default.
- W2969871719 isParatext "false" @default.
- W2969871719 isRetracted "false" @default.
- W2969871719 magId "2969871719" @default.
- W2969871719 workType "article" @default.