FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2969897127> ?p ?o ?g. }

• W2969897127 abstract "In this paper, a newly developed ultra-high resolution tactile sensor with a spatial resolution of 0.1µm and a force resolution of 60µN is reported for the first time. The ultrahigh resolution tactile sensor is required for quality control of finished metal surface and painted surface of automobiles that are not replaced by “non-contact” optical measurements. A 0.1µm spatial resolution is realized by a needle-like contactor-tip precisely formed by deep-RIE. A 60µN force resolution is realized by partly narrowed silicon spring. Also, piezoresistors were arranged to maximize the stress sensitivity considering the crystal orientation dependency on piezoresistive effect. The fabricated new device in this study has realized 6 times higher performance in vertical displacement and 40 times higher performance in frictional force resolution than the tactile sensor device that we reported in 2018 [1]. Measured surface shape corresponded well to the actual surface shape in deep sub-micron region." @default.
• W2969897127 created "2019-08-29" @default.
• W2969897127 creator A5014879137 @default.
• W2969897127 creator A5016916716 @default.
• W2969897127 creator A5057740294 @default.
• W2969897127 creator A5070357010 @default.
• W2969897127 creator A5077539819 @default.
• W2969897127 date "2019-06-01" @default.
• W2969897127 modified "2023-09-26" @default.
• W2969897127 title "A 0.1µM-Resoution Silicon Tactile Sensor with Precisely Designed Piezoresitve Sensing Structure" @default.
• W2969897127 cites W2290157520 @default.
• W2969897127 cites W2592493730 @default.
• W2969897127 cites W2594198361 @default.
• W2969897127 cites W2798834899 @default.
• W2969897127 cites W2802232928 @default.
• W2969897127 doi "https://doi.org/10.1109/transducers.2019.8808467" @default.
• W2969897127 hasPublicationYear "2019" @default.
• W2969897127 type Work @default.
• W2969897127 sameAs 2969897127 @default.
• W2969897127 citedByCount "1" @default.
• W2969897127 countsByYear W29698971272022 @default.
• W2969897127 crossrefType "proceedings-article" @default.
• W2969897127 hasAuthorship W2969897127A5014879137 @default.
• W2969897127 hasAuthorship W2969897127A5016916716 @default.
• W2969897127 hasAuthorship W2969897127A5057740294 @default.
• W2969897127 hasAuthorship W2969897127A5070357010 @default.
• W2969897127 hasAuthorship W2969897127A5077539819 @default.
• W2969897127 hasConcept C107551265 @default.
• W2969897127 hasConcept C120665830 @default.
• W2969897127 hasConcept C121332964 @default.
• W2969897127 hasConcept C127413603 @default.
• W2969897127 hasConcept C138268822 @default.
• W2969897127 hasConcept C154945302 @default.
• W2969897127 hasConcept C15744967 @default.
• W2969897127 hasConcept C163258240 @default.
• W2969897127 hasConcept C16345878 @default.
• W2969897127 hasConcept C192562407 @default.
• W2969897127 hasConcept C198490522 @default.
• W2969897127 hasConcept C205372480 @default.
• W2969897127 hasConcept C24890656 @default.
• W2969897127 hasConcept C2524010 @default.
• W2969897127 hasConcept C2780759522 @default.
• W2969897127 hasConcept C33923547 @default.
• W2969897127 hasConcept C41008148 @default.
• W2969897127 hasConcept C46722567 @default.
• W2969897127 hasConcept C49040817 @default.
• W2969897127 hasConcept C542102704 @default.
• W2969897127 hasConcept C544956773 @default.
• W2969897127 hasConcept C62520636 @default.
• W2969897127 hasConcept C66938386 @default.
• W2969897127 hasConcept C76935873 @default.
• W2969897127 hasConcept C78592999 @default.
• W2969897127 hasConcept C81302111 @default.
• W2969897127 hasConcept C90509273 @default.
• W2969897127 hasConceptScore W2969897127C107551265 @default.
• W2969897127 hasConceptScore W2969897127C120665830 @default.
• W2969897127 hasConceptScore W2969897127C121332964 @default.
• W2969897127 hasConceptScore W2969897127C127413603 @default.
• W2969897127 hasConceptScore W2969897127C138268822 @default.
• W2969897127 hasConceptScore W2969897127C154945302 @default.
• W2969897127 hasConceptScore W2969897127C15744967 @default.
• W2969897127 hasConceptScore W2969897127C163258240 @default.
• W2969897127 hasConceptScore W2969897127C16345878 @default.
• W2969897127 hasConceptScore W2969897127C192562407 @default.
• W2969897127 hasConceptScore W2969897127C198490522 @default.
• W2969897127 hasConceptScore W2969897127C205372480 @default.
• W2969897127 hasConceptScore W2969897127C24890656 @default.
• W2969897127 hasConceptScore W2969897127C2524010 @default.
• W2969897127 hasConceptScore W2969897127C2780759522 @default.
• W2969897127 hasConceptScore W2969897127C33923547 @default.
• W2969897127 hasConceptScore W2969897127C41008148 @default.
• W2969897127 hasConceptScore W2969897127C46722567 @default.
• W2969897127 hasConceptScore W2969897127C49040817 @default.
• W2969897127 hasConceptScore W2969897127C542102704 @default.
• W2969897127 hasConceptScore W2969897127C544956773 @default.
• W2969897127 hasConceptScore W2969897127C62520636 @default.
• W2969897127 hasConceptScore W2969897127C66938386 @default.
• W2969897127 hasConceptScore W2969897127C76935873 @default.
• W2969897127 hasConceptScore W2969897127C78592999 @default.
• W2969897127 hasConceptScore W2969897127C81302111 @default.
• W2969897127 hasConceptScore W2969897127C90509273 @default.
• W2969897127 hasLocation W29698971271 @default.
• W2969897127 hasOpenAccess W2969897127 @default.
• W2969897127 hasPrimaryLocation W29698971271 @default.
• W2969897127 hasRelatedWork W1664151329 @default.
• W2969897127 hasRelatedWork W1976594415 @default.
• W2969897127 hasRelatedWork W1979244331 @default.
• W2969897127 hasRelatedWork W1986055204 @default.
• W2969897127 hasRelatedWork W2000744581 @default.
• W2969897127 hasRelatedWork W2016515476 @default.
• W2969897127 hasRelatedWork W2017588405 @default.
• W2969897127 hasRelatedWork W2022173054 @default.
• W2969897127 hasRelatedWork W2044227372 @default.
• W2969897127 hasRelatedWork W2054525959 @default.
• W2969897127 hasRelatedWork W2056118235 @default.
• W2969897127 hasRelatedWork W2075013753 @default.
• W2969897127 hasRelatedWork W2143891597 @default.
• W2969897127 hasRelatedWork W2318568398 @default.
• W2969897127 hasRelatedWork W2325494269 @default.
• W2969897127 hasRelatedWork W2796651600 @default.

• next