FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2970102024> ?p ?o ?g. }

• W2970102024 abstract "In this paper we optimize cryogenic deep reactive ion etching processes to achieve the best aspect ratios of holes in a silicon substrate that is supposed to be used for fabrication of on-chip energy storage. By optimizing capacitively coupled plasma source power and oxygen flow, aspect ratio of 28:1 for holes of 2 μm in diameter was achieved. Bottling effect was suppressed by tuning capacitively coupled plasma, inductively coupled plasma sources and process pressure at the same time. The smoothness and purity of the hole walls are other parameters we investigate using atomic force microscopy and X-ray photoelectron spectroscopy." @default.
• W2970102024 created "2019-09-05" @default.
• W2970102024 creator A5006249454 @default.
• W2970102024 creator A5008227672 @default.
• W2970102024 creator A5037232154 @default.
• W2970102024 creator A5050771880 @default.
• W2970102024 creator A5084669806 @default.
• W2970102024 date "2019-05-01" @default.
• W2970102024 modified "2023-10-03" @default.
• W2970102024 title "Optimization of Cryogenic Deep Reactive Ion Etching Process for On-Chip Energy Storage" @default.
• W2970102024 cites W1997913942 @default.
• W2970102024 cites W2022028280 @default.
• W2970102024 cites W2072583445 @default.
• W2970102024 cites W2109233209 @default.
• W2970102024 cites W2168756522 @default.
• W2970102024 doi "https://doi.org/10.1109/isse.2019.8810293" @default.
• W2970102024 hasPublicationYear "2019" @default.
• W2970102024 type Work @default.
• W2970102024 sameAs 2970102024 @default.
• W2970102024 citedByCount "0" @default.
• W2970102024 crossrefType "proceedings-article" @default.
• W2970102024 hasAuthorship W2970102024A5006249454 @default.
• W2970102024 hasAuthorship W2970102024A5008227672 @default.
• W2970102024 hasAuthorship W2970102024A5037232154 @default.
• W2970102024 hasAuthorship W2970102024A5050771880 @default.
• W2970102024 hasAuthorship W2970102024A5084669806 @default.
• W2970102024 hasConcept C100460472 @default.
• W2970102024 hasConcept C111368507 @default.
• W2970102024 hasConcept C113196181 @default.
• W2970102024 hasConcept C120665830 @default.
• W2970102024 hasConcept C121332964 @default.
• W2970102024 hasConcept C124634506 @default.
• W2970102024 hasConcept C127313418 @default.
• W2970102024 hasConcept C127413603 @default.
• W2970102024 hasConcept C130472188 @default.
• W2970102024 hasConcept C136525101 @default.
• W2970102024 hasConcept C142724271 @default.
• W2970102024 hasConcept C171250308 @default.
• W2970102024 hasConcept C175708663 @default.
• W2970102024 hasConcept C185592680 @default.
• W2970102024 hasConcept C192562407 @default.
• W2970102024 hasConcept C204787440 @default.
• W2970102024 hasConcept C2777289219 @default.
• W2970102024 hasConcept C2779227376 @default.
• W2970102024 hasConcept C40003534 @default.
• W2970102024 hasConcept C42360764 @default.
• W2970102024 hasConcept C43617362 @default.
• W2970102024 hasConcept C49040817 @default.
• W2970102024 hasConcept C544956773 @default.
• W2970102024 hasConcept C62520636 @default.
• W2970102024 hasConcept C68687820 @default.
• W2970102024 hasConcept C71924100 @default.
• W2970102024 hasConcept C82706917 @default.
• W2970102024 hasConcept C95974651 @default.
• W2970102024 hasConceptScore W2970102024C100460472 @default.
• W2970102024 hasConceptScore W2970102024C111368507 @default.
• W2970102024 hasConceptScore W2970102024C113196181 @default.
• W2970102024 hasConceptScore W2970102024C120665830 @default.
• W2970102024 hasConceptScore W2970102024C121332964 @default.
• W2970102024 hasConceptScore W2970102024C124634506 @default.
• W2970102024 hasConceptScore W2970102024C127313418 @default.
• W2970102024 hasConceptScore W2970102024C127413603 @default.
• W2970102024 hasConceptScore W2970102024C130472188 @default.
• W2970102024 hasConceptScore W2970102024C136525101 @default.
• W2970102024 hasConceptScore W2970102024C142724271 @default.
• W2970102024 hasConceptScore W2970102024C171250308 @default.
• W2970102024 hasConceptScore W2970102024C175708663 @default.
• W2970102024 hasConceptScore W2970102024C185592680 @default.
• W2970102024 hasConceptScore W2970102024C192562407 @default.
• W2970102024 hasConceptScore W2970102024C204787440 @default.
• W2970102024 hasConceptScore W2970102024C2777289219 @default.
• W2970102024 hasConceptScore W2970102024C2779227376 @default.
• W2970102024 hasConceptScore W2970102024C40003534 @default.
• W2970102024 hasConceptScore W2970102024C42360764 @default.
• W2970102024 hasConceptScore W2970102024C43617362 @default.
• W2970102024 hasConceptScore W2970102024C49040817 @default.
• W2970102024 hasConceptScore W2970102024C544956773 @default.
• W2970102024 hasConceptScore W2970102024C62520636 @default.
• W2970102024 hasConceptScore W2970102024C68687820 @default.
• W2970102024 hasConceptScore W2970102024C71924100 @default.
• W2970102024 hasConceptScore W2970102024C82706917 @default.
• W2970102024 hasConceptScore W2970102024C95974651 @default.
• W2970102024 hasLocation W29701020241 @default.
• W2970102024 hasOpenAccess W2970102024 @default.
• W2970102024 hasPrimaryLocation W29701020241 @default.
• W2970102024 hasRelatedWork W116635223 @default.
• W2970102024 hasRelatedWork W1966710258 @default.
• W2970102024 hasRelatedWork W1974158836 @default.
• W2970102024 hasRelatedWork W1998769257 @default.
• W2970102024 hasRelatedWork W2030343633 @default.
• W2970102024 hasRelatedWork W2068235362 @default.
• W2970102024 hasRelatedWork W2079573315 @default.
• W2970102024 hasRelatedWork W2086514397 @default.
• W2970102024 hasRelatedWork W2095256262 @default.
• W2970102024 hasRelatedWork W2123436758 @default.
• W2970102024 hasRelatedWork W2133969738 @default.
• W2970102024 hasRelatedWork W2135841236 @default.
• W2970102024 hasRelatedWork W2137158060 @default.
• W2970102024 hasRelatedWork W2152423683 @default.
• W2970102024 hasRelatedWork W2553548716 @default.

• next