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- W2973191531 endingPage "2141" @default.
- W2973191531 startingPage "2141" @default.
- W2973191531 abstract "In this work, a silicon nanopillar array was created with nanosphere lithography. SnO2 film was deposited on this nanostructure by magnetron sputtering to form an SnO2/silicon nanopillar array sensor. The humidity sensitivity, response time, and recovery time were all measured at room temperature (25 °C) with UV or without UV irradiation. As a result, the humidity sensitivity properties were improved by enlarging the specific surface area with ordered nanopillars and irradiating with UV light. These results indicate that nanostructure sensors have potential applications in the field of sensors." @default.
- W2973191531 created "2019-09-19" @default.
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- W2973191531 date "2019-05-09" @default.
- W2973191531 modified "2023-10-18" @default.
- W2973191531 title "Enhanced Humidity Sensing Response of SnO2/Silicon Nanopillar Array by UV Irradiation" @default.
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- W2973191531 doi "https://doi.org/10.3390/s19092141" @default.
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