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- W2973391207 abstract "An algorithm-based stitching interferometry method was developed for the measurement of mirrors with large radii of curvature, where the single-shot measurement of the surface figure is not possible. The global and adjacent-subaperture stitching algorithms were compared and the influence of the overlap ratio, the effect of the defocusing error, and methods for its reduction were studied. Using the global stitching algorithm, a root mean square repeatability error of the surface measurement of 0.24 nm was achieved. The centerlines of the stitching result showed good agreement with those from the Nanometer Optical Component Measuring Machine." @default.
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- W2973391207 date "2019-09-16" @default.
- W2973391207 modified "2023-10-11" @default.
- W2973391207 title "Accuracy analysis and improvement of an algorithm-based stitching interferometry method for curved mirrors with large radii of curvature" @default.
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- W2973391207 doi "https://doi.org/10.1364/osac.2.002783" @default.
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