Matches in SemOpenAlex for { <https://semopenalex.org/work/W2974369540> ?p ?o ?g. }
- W2974369540 endingPage "125002" @default.
- W2974369540 startingPage "125002" @default.
- W2974369540 abstract "This paper presents the design and fabrication strategy of a lead zirconate titanate (PZT)-based piezoelectric micromachined ultrasound transducers (pMUT) with the objective of maximizing its performance. Choosing the most suitable thickness of the PZT layer, the radius of the top electrode, and the effect of the residual stress on the resonance frequency of a pMUT are investigated by finite element method (FEM) simulation and analytical equations. Three different architectures of pMUTs are presented: (i) a pMUT with a top center electrode, (ii) a pMUT with a top center and ring electrode, (iii) a pMUT with a patterned PZT layer. All three pMUT architectures were fabricated and their displacement response, resonance frequency, and Q-factor are compared. The fabricated pMUT in all three architectures has a radius of 205 m, a Si membrane thickness of 6 m, and a PZT thickness of 1 m. The experimental results were compared to FEM simulation. The proposed architectures have a displacement response of 6.6 m V−1, 7.5 m V−1, and 8.6 m V−1, respectively, for their optimum design parameters." @default.
- W2974369540 created "2019-09-26" @default.
- W2974369540 creator A5016129715 @default.
- W2974369540 creator A5023285948 @default.
- W2974369540 creator A5065990366 @default.
- W2974369540 date "2019-10-04" @default.
- W2974369540 modified "2023-09-23" @default.
- W2974369540 title "Design and fabrication strategy for an efficient lead zirconate titanate based piezoelectric micromachined ultrasound transducer" @default.
- W2974369540 cites W1488262856 @default.
- W2974369540 cites W1978427110 @default.
- W2974369540 cites W1983054200 @default.
- W2974369540 cites W1983987791 @default.
- W2974369540 cites W1997744735 @default.
- W2974369540 cites W2002650650 @default.
- W2974369540 cites W2019123650 @default.
- W2974369540 cites W2020590373 @default.
- W2974369540 cites W2038808562 @default.
- W2974369540 cites W2040027505 @default.
- W2974369540 cites W2056106068 @default.
- W2974369540 cites W2073123044 @default.
- W2974369540 cites W2087921477 @default.
- W2974369540 cites W2104125661 @default.
- W2974369540 cites W2107448886 @default.
- W2974369540 cites W2136756132 @default.
- W2974369540 cites W2145602502 @default.
- W2974369540 cites W2149379451 @default.
- W2974369540 cites W2160087299 @default.
- W2974369540 cites W2165091983 @default.
- W2974369540 cites W2316520285 @default.
- W2974369540 cites W2406101030 @default.
- W2974369540 cites W2462134714 @default.
- W2974369540 cites W2530195409 @default.
- W2974369540 cites W2562144918 @default.
- W2974369540 cites W2592457912 @default.
- W2974369540 cites W2615758187 @default.
- W2974369540 cites W2617446799 @default.
- W2974369540 cites W2743764621 @default.
- W2974369540 cites W2761586550 @default.
- W2974369540 cites W2789945752 @default.
- W2974369540 cites W2792386646 @default.
- W2974369540 cites W2793731077 @default.
- W2974369540 cites W2892248497 @default.
- W2974369540 cites W2902256886 @default.
- W2974369540 cites W2907575134 @default.
- W2974369540 cites W2912767292 @default.
- W2974369540 cites W2969302913 @default.
- W2974369540 cites W2969326786 @default.
- W2974369540 doi "https://doi.org/10.1088/1361-6439/ab4527" @default.
- W2974369540 hasPublicationYear "2019" @default.
- W2974369540 type Work @default.
- W2974369540 sameAs 2974369540 @default.
- W2974369540 citedByCount "11" @default.
- W2974369540 countsByYear W29743695402019 @default.
- W2974369540 countsByYear W29743695402020 @default.
- W2974369540 countsByYear W29743695402021 @default.
- W2974369540 countsByYear W29743695402022 @default.
- W2974369540 countsByYear W29743695402023 @default.
- W2974369540 crossrefType "journal-article" @default.
- W2974369540 hasAuthorship W2974369540A5016129715 @default.
- W2974369540 hasAuthorship W2974369540A5023285948 @default.
- W2974369540 hasAuthorship W2974369540A5065990366 @default.
- W2974369540 hasBestOaLocation W29743695402 @default.
- W2974369540 hasConcept C100082104 @default.
- W2974369540 hasConcept C107551265 @default.
- W2974369540 hasConcept C121332964 @default.
- W2974369540 hasConcept C127413603 @default.
- W2974369540 hasConcept C133386390 @default.
- W2974369540 hasConcept C135405054 @default.
- W2974369540 hasConcept C135628077 @default.
- W2974369540 hasConcept C136525101 @default.
- W2974369540 hasConcept C142724271 @default.
- W2974369540 hasConcept C15744967 @default.
- W2974369540 hasConcept C159985019 @default.
- W2974369540 hasConcept C178635117 @default.
- W2974369540 hasConcept C192562407 @default.
- W2974369540 hasConcept C204787440 @default.
- W2974369540 hasConcept C24326235 @default.
- W2974369540 hasConcept C24890656 @default.
- W2974369540 hasConcept C2781128178 @default.
- W2974369540 hasConcept C38652104 @default.
- W2974369540 hasConcept C41008148 @default.
- W2974369540 hasConcept C49040817 @default.
- W2974369540 hasConcept C542102704 @default.
- W2974369540 hasConcept C56318395 @default.
- W2974369540 hasConcept C57693265 @default.
- W2974369540 hasConcept C66938386 @default.
- W2974369540 hasConcept C71924100 @default.
- W2974369540 hasConcept C79090758 @default.
- W2974369540 hasConcept C81288441 @default.
- W2974369540 hasConcept C86194701 @default.
- W2974369540 hasConceptScore W2974369540C100082104 @default.
- W2974369540 hasConceptScore W2974369540C107551265 @default.
- W2974369540 hasConceptScore W2974369540C121332964 @default.
- W2974369540 hasConceptScore W2974369540C127413603 @default.
- W2974369540 hasConceptScore W2974369540C133386390 @default.
- W2974369540 hasConceptScore W2974369540C135405054 @default.
- W2974369540 hasConceptScore W2974369540C135628077 @default.
- W2974369540 hasConceptScore W2974369540C136525101 @default.