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• W2975154311 startingPage "29261" @default.
• W2975154311 abstract "A single femtosecond laser beam can be focused to process material surfaces. However, the low processing efficiency by a single laser beam prevents broad applications of femtosecond laser surface processing. Here we have demonstrated an array of high-intensity femtosecond laser beams that self-focus in a piece of glass medium, enabling high-efficiency, millimeter scale parallel laser surface processing. Experimental and simulation results suggest that the laser fluence of each focused laser beamlet in the array is more than 1.2 J/cm2, which is sufficient for micro- or nano-structure laser processing. To prove the concept, nanoscale structures on silicon surface are generated by the self-focused laser beam array, which may improve the efficiency of black silicon fabrication for photovoltaic devices." @default.
• W2975154311 created "2019-10-03" @default.
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• W2975154311 date "2019-09-26" @default.
• W2975154311 modified "2023-09-26" @default.
• W2975154311 title "All-optical, self-focused laser beam array for parallel laser surface processing" @default.
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• W2975154311 doi "https://doi.org/10.1364/oe.27.029261" @default.
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