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• W2976429435 endingPage "607" @default.
• W2976429435 startingPage "607" @default.
• W2976429435 abstract "In this paper, a parametric three-dimensional (3D) phase-field study of the physical vapor deposition process of metal thin films was performed aiming at quantitative simulations. The effect of deposition rate and model parameters on the microstructure of deposited thin films was investigated based on more than 200 sets of 3D phase-field simulations, and a quantitative relationship between the deposition rate and model parameters was established. After that, the heat maps corresponding to the experimental atomic force microscopy images were plotted for characterization of the surface roughness. Different roughness parameters including the arithmetic average roughness (Ra), root mean square roughness (Rq), skewness (Rsk), and kurtosis (Rku), as well as the ratio of Rq to Ra were calculated and carefully analyzed. A quantitative relationship between the surface roughness and the deposition rate and model parameters was obtained. Moreover, the calculated Rq to Ra ratios for the thin films at the deposition rates of 0.22 and 1.0 nm s−1 agreed very well with the experimental data of the deposited Mo and Ti thin films. Finally, further discussion about the correlative behaviors between the surface roughness and the density was proposed for reasoning the shadowing effect as well as the formation of voids during the thin film production." @default.
• W2976429435 created "2019-10-03" @default.
• W2976429435 creator A5039896971 @default.
• W2976429435 creator A5067192488 @default.
• W2976429435 creator A5082641677 @default.
• W2976429435 creator A5083293020 @default.
• W2976429435 date "2019-09-25" @default.
• W2976429435 modified "2023-10-12" @default.
• W2976429435 title "A Parametric Three-Dimensional Phase-Field Study of the Physical Vapor Deposition Process of Metal Thin Films Aiming at Quantitative Simulations" @default.
• W2976429435 cites W1972876596 @default.
• W2976429435 cites W1976579419 @default.
• W2976429435 cites W1980353373 @default.
• W2976429435 cites W1988543958 @default.
• W2976429435 cites W1993609138 @default.
• W2976429435 cites W1994260262 @default.
• W2976429435 cites W1996632852 @default.
• W2976429435 cites W2008712916 @default.
• W2976429435 cites W2010135600 @default.
• W2976429435 cites W2011086867 @default.
• W2976429435 cites W2015525529 @default.
• W2976429435 cites W2031200747 @default.
• W2976429435 cites W2039665028 @default.
• W2976429435 cites W2041062000 @default.
• W2976429435 cites W2042864997 @default.
• W2976429435 cites W2046675576 @default.
• W2976429435 cites W2047953862 @default.
• W2976429435 cites W2051551635 @default.
• W2976429435 cites W2053213042 @default.
• W2976429435 cites W2064742049 @default.
• W2976429435 cites W2068744977 @default.
• W2976429435 cites W2082458740 @default.
• W2976429435 cites W2084913165 @default.
• W2976429435 cites W2094940246 @default.
• W2976429435 cites W2139635503 @default.
• W2976429435 cites W2165762656 @default.
• W2976429435 cites W2168156710 @default.
• W2976429435 cites W2417703526 @default.
• W2976429435 cites W2463796987 @default.
• W2976429435 cites W2561131302 @default.
• W2976429435 cites W2583557047 @default.
• W2976429435 cites W2588265153 @default.
• W2976429435 cites W2765904834 @default.
• W2976429435 cites W2774889542 @default.
• W2976429435 cites W2900752213 @default.
• W2976429435 cites W2901122573 @default.
• W2976429435 cites W2902854210 @default.
• W2976429435 doi "https://doi.org/10.3390/coatings9100607" @default.
• W2976429435 hasPublicationYear "2019" @default.
• W2976429435 type Work @default.
• W2976429435 sameAs 2976429435 @default.
• W2976429435 citedByCount "8" @default.
• W2976429435 countsByYear W29764294352020 @default.
• W2976429435 countsByYear W29764294352021 @default.
• W2976429435 countsByYear W29764294352022 @default.
• W2976429435 countsByYear W29764294352023 @default.
• W2976429435 crossrefType "journal-article" @default.
• W2976429435 hasAuthorship W2976429435A5039896971 @default.
• W2976429435 hasAuthorship W2976429435A5067192488 @default.
• W2976429435 hasAuthorship W2976429435A5082641677 @default.
• W2976429435 hasAuthorship W2976429435A5083293020 @default.
• W2976429435 hasBestOaLocation W29764294351 @default.
• W2976429435 hasConcept C107365816 @default.
• W2976429435 hasConcept C113196181 @default.
• W2976429435 hasConcept C151730666 @default.
• W2976429435 hasConcept C159985019 @default.
• W2976429435 hasConcept C171250308 @default.
• W2976429435 hasConcept C185592680 @default.
• W2976429435 hasConcept C19067145 @default.
• W2976429435 hasConcept C192562407 @default.
• W2976429435 hasConcept C2816523 @default.
• W2976429435 hasConcept C43617362 @default.
• W2976429435 hasConcept C57410435 @default.
• W2976429435 hasConcept C64297162 @default.
• W2976429435 hasConcept C71039073 @default.
• W2976429435 hasConcept C86803240 @default.
• W2976429435 hasConceptScore W2976429435C107365816 @default.
• W2976429435 hasConceptScore W2976429435C113196181 @default.
• W2976429435 hasConceptScore W2976429435C151730666 @default.
• W2976429435 hasConceptScore W2976429435C159985019 @default.
• W2976429435 hasConceptScore W2976429435C171250308 @default.
• W2976429435 hasConceptScore W2976429435C185592680 @default.
• W2976429435 hasConceptScore W2976429435C19067145 @default.
• W2976429435 hasConceptScore W2976429435C192562407 @default.
• W2976429435 hasConceptScore W2976429435C2816523 @default.
• W2976429435 hasConceptScore W2976429435C43617362 @default.
• W2976429435 hasConceptScore W2976429435C57410435 @default.
• W2976429435 hasConceptScore W2976429435C64297162 @default.
• W2976429435 hasConceptScore W2976429435C71039073 @default.
• W2976429435 hasConceptScore W2976429435C86803240 @default.
• W2976429435 hasIssue "10" @default.
• W2976429435 hasLocation W29764294351 @default.
• W2976429435 hasLocation W29764294352 @default.
• W2976429435 hasOpenAccess W2976429435 @default.
• W2976429435 hasPrimaryLocation W29764294351 @default.
• W2976429435 hasRelatedWork W1966522691 @default.
• W2976429435 hasRelatedWork W2032025132 @default.
• W2976429435 hasRelatedWork W2349732462 @default.
• W2976429435 hasRelatedWork W2386922414 @default.

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